High-rate deposition of Sb-doped SnO2 films by reactive sputtering using the impedance control method
2014 ◽
Vol 672-674
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pp. 1770-1773
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Keyword(s):
1990 ◽
Vol 43-44
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pp. 270-278
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Keyword(s):
2021 ◽
Vol 67
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pp. 102038