Profile evolution during polysilicon gate etching with low-pressure high-density Cl2/HBr/O2 plasma chemistries

2001 ◽  
Vol 19 (3) ◽  
pp. 711-717 ◽  
Author(s):  
Mutumi Tuda ◽  
Kenji Shintani ◽  
Hiroki Ootera
Keyword(s):  
Low Pressure ◽  
High Density ◽  
Polysilicon Gate ◽  
O2 Plasma

scholarly journals Low pressure shock response and dynamic failure of high density polyethylene (HDPE)

2018 ◽  
Author(s):  
Jennifer L. Jordan ◽  
Dana M. Dattelbaum ◽  
Benjamin F. Schilling ◽  
Cynthia F. Welch ◽  
Jamie A. Stull
Keyword(s):  
High Density Polyethylene ◽  
Low Pressure ◽  
High Density ◽  
Dynamic Failure ◽  
Pressure Shock ◽  
Shock Response

Particle formation in acetylene very low-pressure high density magnetized plasmas

2007 ◽  
Vol 91 (18) ◽  
pp. 181502 ◽  
Author(s):  
Maria Calafat ◽  
David Escaich ◽  
Richard Clergereaux ◽  
Patrice Raynaud ◽  
Yvan Segui
Keyword(s):  
Low Pressure ◽  
Particle Formation ◽  
High Density ◽  
Magnetized Plasmas

High Density Cascaded Arc Produced Plasma Expanding in a Low Pressure Region

2004 ◽  
Vol 44 (56) ◽  
pp. 496-502
Author(s):  
R. P. Dahiya ◽  
N. Kumari ◽  
V. P. Veremiyenko ◽  
G. J. van Rooij ◽  
B. de Groot ◽  
...  
Keyword(s):  
Low Pressure ◽  
High Density ◽  
Pressure Region

Role of the chamber wall in low‐pressure high‐density etching plasmas

1995 ◽  
Vol 77 (2) ◽  
pp. 497-504 ◽  
Author(s):  
James A. O’Neill ◽  
Jyothi Singh
Keyword(s):  
Low Pressure ◽  
High Density ◽  
Chamber Wall
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