Role of the chamber wall in low‐pressure high‐density etching plasmas
1999 ◽
Vol 38
(Part 1, No. 10)
◽
pp. 6084-6089
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1990 ◽
Vol 19
(2)
◽
pp. 299-309
◽
1974 ◽
Vol 33
◽
pp. 45-48
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2020 ◽
Keyword(s):
1986 ◽
Vol 261
(17)
◽
pp. 8002-8008
1977 ◽
Vol 252
(4)
◽
pp. 1208-1216
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