Atomic-order thermal nitridation of Si(100) and subsequent growth of Si
2001 ◽
Vol 19
(4)
◽
pp. 1907-1911
◽
1998 ◽
Vol 145
(12)
◽
pp. 4252-4256
◽
1995 ◽
Vol 05
(C8)
◽
pp. C8-973-C8-978
Keyword(s):
1976 ◽
Vol 33
(9)
◽
pp. 2089-2096
◽