(Invited) Atomic-Order Thermal Nitridation of Si, Si1-xGex and Ge by NH3
1998 ◽
Vol 145
(12)
◽
pp. 4252-4256
◽
2001 ◽
Vol 19
(4)
◽
pp. 1907-1911
◽
1995 ◽
Vol 05
(C8)
◽
pp. C8-973-C8-978
1974 ◽
Vol 5
(5)
◽
pp. 1239-1247
◽