Atomic-Order Thermal Nitridation of Si1-xGex(100) at Low Temperatures by NH3
1998 ◽
Vol 145
(12)
◽
pp. 4252-4256
◽
2001 ◽
Vol 19
(4)
◽
pp. 1907-1911
◽
1984 ◽
Vol 42
◽
pp. 268-269
1981 ◽
Vol 39
◽
pp. 28-29