Measurements of the electron energy distribution function in an Ar/CF4 inductively coupled plasma

2001 ◽  
Vol 90 (5) ◽  
pp. 2158-2161 ◽  
Author(s):  
M. D. Bowden ◽  
R. Tabata ◽  
P. Suanpoot ◽  
K. Uchino ◽  
K. Muraoka ◽  
...  
Keyword(s):  
Distribution Function ◽  
Energy Distribution ◽  
Electron Energy ◽  
Inductively Coupled Plasma ◽  
Electron Energy Distribution Function ◽  
Energy Distribution Function ◽  
Electron Energy Distribution ◽  
Inductively Coupled
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