The Submicron Fabrication Process for T Gate With a Flat Head

2018 ◽  
Author(s):  
Xiaoyu Su ◽  
Zhongjing Ren ◽  
Hao Sun ◽  
Yong Shi ◽  
Quan Pan
Keyword(s):  
Optical Microscope ◽  
Fabrication Process ◽  
Experimental Results ◽  
General Process ◽  
Gate Structure ◽  
Measurement Results

T gate structure is traditionally manufactured with a valley in its head, which requires the thickness of the head layer to thicker than the height of foot layer. As is presented in this paper, an innovative submicron fabrication process is investigated for T gate structures to construct a flat head in order to get rid of that constraint. In detail, the reason why conventional T gate fabrication cannot manufacture a flat head is analyzed, and then a general process for flat head T gate structure is proposed considering various resist and structure materials. After that, a typical submicron sample has been manufactured using aluminum and NiTi. Furthermore, the particular photo resists and recipes adopted in that sample are considered. To clearly illustrate the proposed technique as well as verify its feasibility, top views of the structure under optical microscope along with the measurement results of thickness after every step are recorded. According to those experimental results, the valley in T gate’s head is proved to be avoided during fabrication.

Research on Micro Accelerometer Array

2007 ◽  
Author(s):  
Jijun Xiong ◽  
Haiyang Mao ◽  
Wendong Zhang ◽  
Dong Xu ◽  
Tao Guo
Keyword(s):  
Frequency Response ◽  
Physical Process ◽  
Dynamic Measurement ◽  
Fabrication Process ◽  
Experimental Results ◽  
Response Characteristics ◽  
Measurement Results ◽  
Frequency Response Characteristics ◽  
Testing Range ◽  
Micro Accelerometer

In a physical process, there might be more than one acceleration to be measured, but a micro accelerometer of a certain testing range can hardly satisfy the measurement requirement. In this paper, a micro accelerometer array with four testing ranges, namely, 0∼100g, 0∼500g, 0∼1,000g and 0∼2,000g, is designed and fabricated. In addition to the design and fabrication process, the protection for the array elements on the condition of overload is described in detail. From the static and dynamic measurement results, it is known that the array has linearity smaller than 2.5%, what’s more, it has quite good frequency response characteristics. The experimental results demonstrate that the array can be used for the measurement of a physical process with multi-acceleration.

Interaction Between Low Temperatures Spacers and Source Drain Extensions and Pockets for Both NMOS and PMOS of the 65 nm Node Technology

2006 ◽  
Vol 912 ◽  
Author(s):  
Nathalie Cagnat ◽  
Cyrille Laviron ◽  
Daniel Mathiot ◽  
Pierre Morin ◽  
Frédéric Salvetti ◽  
...  
Keyword(s):  
Oxide Layer ◽  
Hydrogen Content ◽  
Low Temperatures ◽  
Direct Contact ◽  
Fabrication Process ◽  
Experimental Results ◽  
The Other ◽  
Mos Transistors ◽  
Phosphorus Source ◽  
Activation Annealing

AbstractDuring the MOS transistors fabrication process, the source-drain extension areas are directly in contact with the oxide liner of the spacers stack. In previous works [1, 2, 3] it has been established that boron can diffuse from the source-drain extensions into the spacer oxide liner during the subsequent annealing steps, and that the amount of boron loss depends on the hydrogen content in the oxide, because it enhances B diffusivity in SiO2.In order to characterize and quantify the above phenomena, we performed test experiments on full sheet samples, which mimic either BF2 source-drain extensions over arsenic pockets implants, or BF2 pockets under arsenic or phosphorus source-drain extensions implants. Following the corresponding implants, the wafers were covered with different spacer stacks (oxide + nitride) deposited either by LPCVD, or PECVD. After appropriate activation annealing steps, SIMS measurements were used to characterize the profiles of the various dopants, and the corresponding dose loss was evaluated for each species.Our experimental results clearly evidence that LPCVD or PECVD spacer stacks have no influence on the arsenic profiles. On the other hand, phosphorus and boron profiles are affected. For boron profiles, each spacer type has a different influence. It is also shown that boron out-diffuses not only from the B doped source-drain extension in direct contact with the oxide layer, but also from the "buried" B pockets lying under n-doped source drain extension areas. All these results are discussed in term of the possible relevant mechanism.

Superlensing property of 2-D glass photonic crystal

2020 ◽  
Vol 92 (2) ◽  
pp. 20501
Author(s):  
Rajib Ghosh ◽  
Rajib Chakraborty
Keyword(s):  
Photonic Crystal ◽  
Optical Absorption ◽  
Glass Matrix ◽  
Optical Microscope ◽  
Fabrication Process ◽  
Square Lattice ◽  
Two Dimensional ◽  
Subwavelength Imaging

A two dimensional square lattice photonic crystal (PhC) formed by placing glass matrix in air is proposed for subwavelength imaging around 840 nm. The superlensing behavior at relatively lower wavelength compared to other reported PhC superlens is obtained by this configuration. Other advantages of using glass is that they have lower optical absorption at this wavelength and is relatively cheap. By placing the proposed PhC arrangement between the object and the objective of a conventional optical microscope, superlensing effect can be realized. Moreover, any change in radius of glass rod during fabrication process can result in the shift of superlensing wavelength.

Dry Etching Techniques of Amorphous Silicon for Suspended Metal Membrane RF MEMS Capacitors

2002 ◽  
Vol 729 ◽  
Author(s):  
Raphaël Fritschi ◽  
Cyrille Hibert ◽  
Philippe Flückiger ◽  
Adrian M. Ionescu
Keyword(s):  
Amorphous Silicon ◽  
Rf Mems ◽  
Dry Etching ◽  
Fabrication Process ◽  
Experimental Results ◽  
Post Processing ◽  
Etching Technique ◽  
Metal Membrane ◽  
Tunable Capacitors ◽  
Wet Process

AbstractA novel dry etching technique of amorphous silicon is proposed to suspend the metal membrane of RF MEMS tunable capacitors. The proposed fabrication process is simple and excludes all the drawbacks related to a wet process. Moreover, it has the advantage of being fully compatible with CMOS post-processing. Experimental results demonstrate that the capacitor suspension beams design with meanders can reduce the tuning voltage to less than 5 to 10 V.

Dual-wideband bandpass filter with independently controllable center frequencies and wide stopband

2017 ◽  
Vol 10 (1) ◽  
pp. 93-99 ◽  
Author(s):  
Yang Xiong ◽  
Litian Wang ◽  
Doudou Pang ◽  
Wei Zhang ◽  
Fan Zhang ◽  
...  
Keyword(s):  
Bandpass Filter ◽  
Experimental Results ◽  
The Other ◽  
Mode Analysis ◽  
Center Frequency ◽  
Analysis Method ◽  
Measurement Results ◽  
Mode Resonator ◽  
Good Agreement

In this paper, a dual-wideband bandpass filter (BPF) with independently controllable center frequencies (CFs) and wide stopband suppression is presented using a new quintuple-mode resonator (QMR). By applying the classical odd-/even-mode analysis method, the resonant characteristics of the new QMR have been analyzed. It shows that five modes can be excited, and two of them can be employed to form the lower passband, while the other three modes contribute to the higher passband. For verification, a dual-wideband BPF using the new QMR is designed, fabricated, and tested. Experimental results show that the CFs of the dual-wideband BPF centered at 2.96 GHz and 5.695 GHz with 3 dB fractional bandwidths of 27.7 and 23.4%, respectively. In addition, 20-dB suppression in upper-stopband ranges from 2.23 to 4.04f0, where f0 is the center frequency of the first passband. The measurement results are in good agreement with the prediction results.

Effects of Growth Rates on Directionally Solidified Microstructure of Al-Ni-Y Ternary Alloy

2012 ◽  
Vol 562-564 ◽  
pp. 477-481
Author(s):  
Rui Xu
Keyword(s):  
Temperature Gradient ◽  
Directional Solidification ◽  
Ternary Alloy ◽  
Growth Rates ◽  
Optical Microscope ◽  
Experimental Results ◽  
Al Alloy ◽  
Directionally Solidified ◽  
X Ray Diffraction ◽  
X Ray

The directional solidification of the ternary Al alloy with composition of 2.6 at%Ni, 0.9 at%Y and 96.5 at% Al was carried out under the temperature gradient of 5 K/mm and the droping velocities of 0.5 mm/min, 1 mm/min, 5 mm/min, 10 mm/min, and 25 mm/min. The microstructure of the Al-Ni-Y ternary alloy was also analyzed by X-ray diffraction and optical microscope. The experimental results show that the microstructures of the Al-Ni-Y ternary alloy are consisted of ª-Al2, Al3Ni and Y4Ni6Al23phase when the alloy was directionally solidified in all directionally solidified rates in the experiments. No primary -Al can be found in the sample with directionally solidified rate of 0.5 mm/min. When the rates higher than 1 mm/min, the primary ª-Al can be observed. The microstructure of the directionally solidified alloy becomes finer and the primary ª-Al is smaller gradually with the increasing of growth velocities when the dropping rate of directional solidification is higher than 5 min/min. Two eutectic structures, Y4Ni6Al23andª-Al eutectic and Al3Ni and ª-Al eutectic, can be found when the dropping rate is higher than 10 mm/min.

Effect of Preheating on the Delamination and Crack Formation in Laser Solid Freeform Fabrication Process

2008 ◽  
Author(s):  
Masoud Alimardani ◽  
Ehsan Toyserkani ◽  
Jan Paul Huissoon
Keyword(s):  
Thermal Stresses ◽  
Crack Formation ◽  
Solid Freeform Fabrication ◽  
Fabrication Process ◽  
Experimental Results ◽  
Stress Fields ◽  
Thin Wall ◽  
Freeform Fabrication ◽  
Micro Cracks ◽  
Laser Solid Freeform Fabrication

This paper presents a numerical-experimental investigation on the effects of preheating the substrate on the potential delamination and crack formation across the parts fabricated using the Laser Solid Freeform Fabrication (LSFF) process. For this purpose, the temperature distributions and stress fields induced during the multilayer LSFF process, and their correlation with the delamination and crack formation are studied throughout the numerical analysis and the experimental fabrication of a four-layer thin wall of SS304L. A 3D time-dependent numerical approach is used to simulate the LSFF process, and also interpret the experimental results in terms of the temperature distribution and the thermal stress fields. The numerical results show that by preheating the substrate prior to the fabrication process, the thermal stresses throughout the process domain substantially reduce. Accordingly, this can result in the reduction of potential micro-cracks formation across the fabricated part. Preheating also decreases the transient time for the development of a proper melt pool which is an important factor to prevent poor bonding between deposited layers. The experimental results are used to verify the numerical findings as well as the feasibility of preheating on the reduction of the micro-cracks formed throughout the fabrication process.

Nanostructured 316 Stainless Steel Prepared under Traction by Surface Mechanical Attrition Treatment

2009 ◽  
Vol 614 ◽  
pp. 201-206
Author(s):  
Xiao Fang Yang ◽  
Jian Lu
Keyword(s):  
Stainless Steel ◽  
Optical Microscope ◽  
Steel Sample ◽  
Surface Mechanical Attrition Treatment ◽  
Stainless Steel Sample ◽  
Transmission Electron ◽  
Mechanical Attrition ◽  
Nanostructured Layer ◽  
Nanoindentation Measurement ◽  
Measurement Results

A nanostructured 316 austenitic stainless steel sample was prepared under traction using a new surface mechanical attrition treatment (SMAT) system. The microstructure of the surface layer of the SMATed sample was characterized using an optical microscope and transmission electron microscope (TEM). Microhardness on the cross-section was investigated by nanoindentation measurement. Results showed that a deeper nanostructured layer was obtained in comparison with that of the sample SMATed without traction.

scholarly journals Measurement of the Parameters of Multiple Sinusoids Based on Binary Data

2021 ◽  
Author(s):  
Paolo Carbone
Keyword(s):  
Binary Data ◽  
Threshold Level ◽  
Experimental Results ◽  
Peak Amplitude ◽  
Theoretical Simulation ◽  
Simulation Based ◽  
Measurement Results ◽  
Sinusoidal Signals ◽  
The One

<p>This paper introduces a novel procedure for quick estimation of the parameters of a sum of sinusoidal signals based on one-bit measurements. Amplitude, phases and, frequencies of the signal components are assumed unknown, as well as the threshold level of the comparator used to produce measurement results. To provide enough information at the one-bit quantizer input, a sinewave is assumed to dither one of the two comparator's inputs. To ease the procedure's application, only the peak-to-peak amplitude of this dither signal is assumed known. Theoretical, simulation-based and experimental results validate the presented approach.</p>

scholarly journals Hemi-Ellipsoidal microlensed fiber based on polishing and polymer technology

2021 ◽  
Author(s):  
Nadjiba Boulaiche ◽  
Philippe Rochard ◽  
Assia Guessoum ◽  
Nacer-Eddine Demagh ◽  
Monique Thual
Keyword(s):  
Laser Beam ◽  
Near Field ◽  
Single Mode ◽  
Experimental Results ◽  
Advanced Technology ◽  
Mode Field ◽  
Measurement Results ◽  
Mechanical Micromachining

Abstract This paper represents a development of a new advanced technology to fabricate and characterize micro-collimators with hemi-ellipsoidal microlenses at single-mode fibers outputs. The proposed method utilizes the controlled mechanical micromachining technique based on the variation of the speed of the fiber around its axis in both X and Y directions followed by the injection of a quantity of polydimethylsiloxane (PDMS) to form the hemi-ellipsoidal microlenses. The experimental results show that this technique allows to obtain a wide variety of ellipticity diameters ratios from 0.68 to 0.84. An elliptical ratio of radii of curvature Ry/Rx in a range of 0.51 at 0.86 is also obtained. In this investigation a mode field diameters MFD in an interval between 3.26 µm and 9.93 µm have been realized. The measurement results demonstrate that the proposed technology allows to fabricate hemi-ellipsoidal microlenses having an MFD ellipticity ratios of about 0.60 to 0.97 in near field promising for micro-collimator suitable to match an elliptical laser beam to the circular one of a fiber.

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