Dynamic Responses of a Self-Moving Precision Positioning Stage Impacted by a Spring-Mounted Piezoelectric Actuator
2003 ◽
Vol 125
(4)
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pp. 658-661
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Keyword(s):
The Self
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The piezoelectric actuator (PA) has been used for precision positioning from micrometer down to nanometer scale. In this paper, a spring-mounted PA is designed to achieve a high accuracy and self-moving ability in precision positioning motion. The contact force between the hammer and the self-moving stage, and the friction force of Leuven’s model caused between the grinded groove and the self-moving stage are considered. The governing equations of the system are formulated by using the finite-element method (FEM). The numerical solutions are provided to compare with the experimental results, and demonstrate the well agreement of the present theoretical formulations.
2002 ◽
Vol 102
(1-2)
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pp. 83-92
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Dynamic responses of a precision positioning table impacted by a soft-mounted piezoelectric actuator
2004 ◽
Vol 28
(3)
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pp. 252-260
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Keyword(s):
2017 ◽
Vol 83
(10)
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pp. 956-961
2014 ◽
Vol 953-954
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pp. 1653-1656
2001 ◽
Vol 123
(4)
◽
pp. 502-509
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