Dynamic responses of a precision positioning table impacted by a soft-mounted piezoelectric actuator

2004 ◽  
Vol 28 (3) ◽  
pp. 252-260 ◽  
Author(s):  
Yung-Tien Liu ◽  
Rong-Fong Fung ◽  
Tai-Kun Huang
Keyword(s):  
Piezoelectric Actuator ◽  
Dynamic Responses ◽  
Precision Positioning

Dynamic Responses of a Self-Moving Precision Positioning Stage Impacted by a Spring-Mounted Piezoelectric Actuator

2003 ◽  
Vol 125 (4) ◽  
pp. 658-661 ◽  
Author(s):  
Rong-Fong Fung, ◽  
Yung-Tien Liu, ◽  
Tai-Kun Huang, ◽  
Toshiro Higuchi,
Keyword(s):  
Piezoelectric Actuator ◽  
Numerical Solutions ◽  
High Accuracy ◽  
The Self ◽  
Dynamic Responses ◽  
Nanometer Scale ◽  
The Finite Element Method ◽  
Governing Equations ◽  
Precision Positioning ◽  
Positioning Stage

The piezoelectric actuator (PA) has been used for precision positioning from micrometer down to nanometer scale. In this paper, a spring-mounted PA is designed to achieve a high accuracy and self-moving ability in precision positioning motion. The contact force between the hammer and the self-moving stage, and the friction force of Leuven’s model caused between the grinded groove and the self-moving stage are considered. The governing equations of the system are formulated by using the finite-element method (FEM). The numerical solutions are provided to compare with the experimental results, and demonstrate the well agreement of the present theoretical formulations.

Application of DSP for Precision Positioning System Controlling

2004 ◽  
Author(s):  
Jau-Liang Chen ◽  
Tsang-Chou Li
Keyword(s):  
Standard Deviation ◽  
Piezoelectric Actuator ◽  
Feedforward Control ◽  
Displacement Sensor ◽  
Positioning System ◽  
Precision Positioning ◽  
Control Rule ◽  
Point Test ◽  
Lever Mechanism ◽  
Developing System

The objective of this research was to use a DSP for controlling a nano-precision positioning system. The positioning system was constructed by a piezoelectric actuator, a flexural stage that composed by notch hinges and parallel springs; capacitor sensor was used instead of laser interferometer as displacement sensor. In order to increase the traveling range of the stage, a lever mechanism was used to enlarge the displacement of the piezoelectric actuator. In this study a Dmatek PICE-DSP 320C542 microcomputer developing system was used as the controller, which contained a TI TMS320C542 DSP chip. PI feedback control rule together with n-times feedforward control rule were used for the controlling of this system. Three different experiments were conducted: (1) fixed-point test; (2) continuous stepping test; and (3) ramp-tracking test. From the experiment results, it was shown that the bias Ess was within 2 nm and the standard deviation 1σ was around 30 nm, with settling time less than 0.02 sec, in the continuous stepping test. While, in the ramp-tracking test, the bias Ess was less than 1.25 nm and the standard deviation 1σ was around 35 nm.

Active tuning of the vibration band gap characteristics of periodic laminated composite metamaterial beams

2020 ◽  
Vol 31 (6) ◽  
pp. 843-859 ◽  
Author(s):  
Tao Ren ◽  
Chunchuan Liu ◽  
Fengming Li ◽  
Chuanzeng Zhang
Keyword(s):  
Band Gap ◽  
Piezoelectric Actuator ◽  
Composite Beam ◽  
Laminated Composite ◽  
Dynamic Responses ◽  
Vibration Band ◽  
Gap Characteristics ◽  
Laminated Composite Beam ◽  
Gap Width ◽  
Band Gap Width

A novel strategy is proposed to investigate the vibration band-gap and active tuning characteristics of the laminated composite metamaterial beams. The piezoelectric actuator/sensor pairs are periodically placed along the laminated composite beam axis so that the vibration frequency band-gap and active tuning characteristics can be induced. The dynamic equations of the laminated composite metamaterial beams bonded by the piezoelectric actuator/sensor pairs are established based on the Euler–Bernoulli beam theory. The negative proportional feedback control strategy is employed to provide the positive active control stiffness for the piezoelectric actuator/sensor patches. The spectral element method is used to calculate the dynamic responses of the laminated composite metamaterial beams with the periodically placed piezoelectric patches, and the calculation accuracy for the dynamic responses is validated by the finite element method. The results demonstrating the high-performance vibration band-gap properties in the low-frequency ranges can be achieved by properly designing the sizes and the number of the piezoelectric patches. Moreover, the vibration band-gap characteristics, especially the band-gap width and the normalized band-gap width with respect to the considered excitation frequency range, can be significantly changed by tuning the structural parameters of the piezoelectric actuators and sensors. In addition, the cross-ply angle of the laminated composite metamaterial beams has significant influences on the band-gap characteristics and the vibration reduction performance of the laminated composite beam structures.

New amplified piezoelectric actuator for precision positioning and active damping

1997 ◽  
Author(s):  
Ronan Le Letty ◽  
Frank Claeyssen ◽  
Nicolas Lhermet ◽  
Philippe Bouchilloux
Keyword(s):  
Piezoelectric Actuator ◽  
Active Damping ◽  
Precision Positioning
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