Experimental study of an argon-hydrogen Z pinch plasma radiation source

2002 ◽  
Vol 30 (2) ◽  
pp. 498-511 ◽  
Author(s):  
A.V. Shishlov ◽  
R.B. Baksht ◽  
A.Yu. Labetsky ◽  
V.I. Oreshkin ◽  
A.G. Rousskikh ◽  
...  
Keyword(s):  
Experimental Study ◽  
Radiation Source ◽  
Plasma Radiation ◽  
Pinch Plasma ◽  
Z Pinch

An estimation of Z-pinch plasma radiation source for EUVL by using artificial neural networks

2006 ◽  
Author(s):  
C. H. Zhang ◽  
C. C. Ji ◽  
J. G. Shi ◽  
S. Katsuki ◽  
A. Kimura ◽  
...  
Keyword(s):  
Neural Networks ◽  
Artificial Neural Networks ◽  
Radiation Source ◽  
Plasma Radiation ◽  
Pinch Plasma ◽  
Artificial Neural ◽  
Z Pinch

scholarly journals Study on W wire array Z pinch plasma radiation at Qiangguang-Ⅰ facility

2006 ◽  
Vol 55 (11) ◽  
pp. 5917
Author(s):  
Qiu Ai-Ci ◽  
Kuai Bin ◽  
Zeng Zheng-Zhong ◽  
Wang Wen-Sheng ◽  
Qiu Meng-Tong ◽  
...  
Keyword(s):  
Wire Array ◽  
Plasma Radiation ◽  
Pinch Plasma ◽  
Z Pinch

Soft x-ray (0.2

2004 ◽  
Vol 75 (10) ◽  
pp. 4026-4028 ◽  
Author(s):  
B. H. Failor ◽  
N. Qi ◽  
J. S. Levine ◽  
H. Sze ◽  
E. M. Gullickson
Keyword(s):  
Plasma Radiation ◽  
X Ray ◽  
Pinch Plasma ◽  
Radiation Sources ◽  
Z Pinch

scholarly journals The K-shell radiation of a double gas puff z-pinch with an axial magnetic field

2003 ◽  
Vol 21 (2) ◽  
pp. 255-264 ◽  
Author(s):  
S.A. CHAIKOVSKY ◽  
A.Yu. LABETSKY ◽  
V.I. ORESHKIN ◽  
A.V. SHISHLOV ◽  
R.B. BAKSHT ◽  
...  
Keyword(s):  
Magnetic Field ◽  
Radiation Source ◽  
Axial Magnetic Field ◽  
Radiation Power ◽  
Plasma Radiation ◽  
Radiation Hydrodynamics ◽  
One Dimensional ◽  
Z Pinch ◽  
Good Agreement

A double shell z-pinch with an axial magnetic field is considered as a K-shell plasma radiation source. One-dimensional radiation-hydrodynamics calculations performed suggest that this scheme holds promise for the production of the K-shell radiation of krypton (hν ≈ 12–17 keV). As a first step in verifying the advantages of this scheme, experiments have been performed to optimize a neon double-shell gas puff with an axial magnetic yield for the K-shell yield and power. The experiments show that the application of an axial magnetic field makes it possible to increase the K-shell radiation power and reduce the shot-to-shot spread in the K-shell yield. Comparisons between the experiments and modeling are made and show good agreement.

An oil-free compact X-pinch plasma radiation source: Design and radiation performance

2017 ◽  
Vol 88 (6) ◽  
pp. 063504 ◽  
Author(s):  
Roman V. Shapovalov ◽  
Rick B. Spielman ◽  
George R. Imel
Keyword(s):  
Radiation Source ◽  
Plasma Radiation ◽  
Pinch Plasma

Characteristics of the spherical pinch plasma radiation source (SPX II) for x-ray, UV, and deep-UV lithography

1993 ◽  
Author(s):  
Shridar Aithal ◽  
Emilio Panarella ◽  
M. Lamari ◽  
B. Hilko ◽  
Robert B. McIntosh
Keyword(s):  
Radiation Source ◽  
Plasma Radiation ◽  
X Ray ◽  
Pinch Plasma ◽  
Uv Lithography ◽  
Deep Uv ◽  
Spherical Pinch
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