An estimation of Z-pinch plasma radiation source for EUVL by using artificial neural networks
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2002 ◽
Vol 30
(2)
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pp. 498-511
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2021 ◽
Vol 2
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pp. 44-54
1999 ◽
Vol 22
(8)
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pp. 723-728
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2002 ◽
Vol 20
(2)
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pp. 89-95
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