An oil-free compact X-pinch plasma radiation source: Design and radiation performance

2017 ◽  
Vol 88 (6) ◽  
pp. 063504 ◽  
Author(s):  
Roman V. Shapovalov ◽  
Rick B. Spielman ◽  
George R. Imel
Keyword(s):  
Radiation Source ◽  
Plasma Radiation ◽  
Pinch Plasma

Experimental study of an argon-hydrogen Z pinch plasma radiation source

2002 ◽  
Vol 30 (2) ◽  
pp. 498-511 ◽  
Author(s):  
A.V. Shishlov ◽  
R.B. Baksht ◽  
A.Yu. Labetsky ◽  
V.I. Oreshkin ◽  
A.G. Rousskikh ◽  
...  
Keyword(s):  
Experimental Study ◽  
Radiation Source ◽  
Plasma Radiation ◽  
Pinch Plasma ◽  
Z Pinch

Characteristics of the spherical pinch plasma radiation source (SPX II) for x-ray, UV, and deep-UV lithography

1993 ◽  
Author(s):  
Shridar Aithal ◽  
Emilio Panarella ◽  
M. Lamari ◽  
B. Hilko ◽  
Robert B. McIntosh
Keyword(s):  
Radiation Source ◽  
Plasma Radiation ◽  
X Ray ◽  
Pinch Plasma ◽  
Uv Lithography ◽  
Deep Uv ◽  
Spherical Pinch

A multi-kilohertz pinch plasma radiation source for extreme ultraviolet lithography

2001 ◽  
Vol 57-58 ◽  
pp. 71-77 ◽  
Author(s):  
Klaus Bergmann ◽  
Oliver Rosier ◽  
Rainer Lebert ◽  
Willi Neff ◽  
Reinhart Poprawe
Keyword(s):  
Radiation Source ◽  
Extreme Ultraviolet ◽  
Plasma Radiation ◽  
Extreme Ultraviolet Lithography ◽  
Ultraviolet Lithography ◽  
Pinch Plasma
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