Scheduling Close-Down Processes Subject to Wafer Residency Constraints for Single-Arm Cluster Tools

2015 ◽  
Author(s):  
QingHua Zhu ◽  
Mengchu Zhou ◽  
Yan Qiao ◽  
NaiQi Wu
Keyword(s):  
Cluster Tools ◽  
Residency Constraints

Noncyclic Scheduling of Multi-Cluster Tools With Residency Constraints Based on Pareto Optimization

2020 ◽  
Vol 33 (3) ◽  
pp. 476-486
Author(s):  
Yuanyuan Yan ◽  
Huangang Wang ◽  
Qinghua Tao ◽  
Wenhui Fan ◽  
Tingyu Lin ◽  
...  
Keyword(s):  
Pareto Optimization ◽  
Cluster Tools ◽  
Residency Constraints

scholarly journals An MIP approach to optimize the fundamental period of multi-cluster tools system with residency constraints

2015 ◽  
Vol 48 (3) ◽  
pp. 1732-1737
Author(s):  
Zhu WANG ◽  
Abdelghani BEKRAR ◽  
Damien TRENTESAUX ◽  
Binghai ZHOU
Keyword(s):  
Fundamental Period ◽  
Cluster Tools ◽  
Residency Constraints
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