Optimal scheduling techniques for cluster tools with process-module and transport-module residency constraints

S. Rostami; B. Hamidzadeh

doi:10.1109/tsm.2002.801379

Optimal scheduling techniques for cluster tools with process-module and transport-module residency constraints

IEEE Transactions on Semiconductor Manufacturing ◽

10.1109/tsm.2002.801379 ◽

2002 ◽

Vol 15 (3) ◽

pp. 341-349 ◽

Cited By ~ 39

Author(s):

S. Rostami ◽

B. Hamidzadeh

Keyword(s):

Optimal Scheduling ◽

Cluster Tools ◽

Residency Constraints

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An optimal scheduling technique for dual-arm robots in cluster tools with residency constraints

Proceedings of the 39th IEEE Conference on Decision and Control (Cat. No.00CH37187) ◽

10.1109/cdc.2000.912239 ◽

2002 ◽

Cited By ~ 2

Author(s):

S. Rostami ◽

B. Hamidzadeh ◽

D. Camporese

Keyword(s):

Optimal Scheduling ◽

Cluster Tools ◽

Residency Constraints ◽

Dual Arm ◽

Scheduling Technique

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Optimal scheduling techniques for cluster tools with process-module and transport-module residency constraints

Proceedings 2001 ICRA. IEEE International Conference on Robotics and Automation (Cat. No.01CH37164) ◽

10.1109/robot.2001.933131 ◽

2002 ◽

Cited By ~ 3

Author(s):

S. Rostami ◽

B. Hamidzadeh

Keyword(s):

Optimal Scheduling ◽

Cluster Tools ◽

Residency Constraints

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Modelling and scheduling analysis of multi-cluster tools with residency constraints based on time constraint sets

International Journal of Production Research ◽

10.1080/00207543.2013.774490 ◽

2013 ◽

Vol 51 (16) ◽

pp. 4835-4852 ◽

Cited By ~ 11

Author(s):

Ming-Xiang Liu ◽

Bing-Hai Zhou

Keyword(s):

Time Constraint ◽

Scheduling Analysis ◽

Cluster Tools ◽

Residency Constraints ◽

Constraint Sets

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Optimal scheduling of time-constrained single-arm cluster tools with wafer revisiting

2016 13th International Workshop on Discrete Event Systems (WODES) ◽

10.1109/wodes.2016.7497872 ◽

2016 ◽

Cited By ~ 1

Author(s):

ZiCheng Liu ◽

NaiQi Wu ◽

FaJun Yang ◽

Yan Qiao

Keyword(s):

Optimal Scheduling ◽

Cluster Tools

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A Closed-Form Solution for Schedulability and Optimal Scheduling of Dual-Arm Cluster Tools With Wafer Residency Time Constraint Based on Steady Schedule Analysis

IEEE Transactions on Automation Science and Engineering ◽

10.1109/tase.2008.2008633 ◽

2010 ◽

Vol 7 (2) ◽

pp. 303-315 ◽

Cited By ~ 118

Author(s):

NaiQi Wu ◽

MengChu Zhou

Keyword(s):

Closed Form ◽

Closed Form Solution ◽

Form Solution ◽

Time Constraint ◽

Optimal Scheduling ◽

Cluster Tools ◽

Dual Arm ◽

Residency Time

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Optimal Scheduling of Complex Multi-Cluster Tools Based on Timed Resource-Oriented Petri Nets

IEEE Access ◽

10.1109/access.2016.2549546 ◽

2016 ◽

Vol 4 ◽

pp. 2096-2109 ◽

Cited By ~ 29

Author(s):

Qinghua Zhu ◽

Naiqi Wu ◽

Yan Qiao ◽

Mengchu Zhou

Keyword(s):

Petri Nets ◽

Optimal Scheduling ◽

Cluster Tools

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Transient scheduling of single armed cluster tools: Algorithms for wafer residency constraints

2013 IEEE International Conference on Automation Science and Engineering (CASE) ◽

10.1109/coase.2013.6653901 ◽

2013 ◽

Cited By ~ 1

Author(s):

Hong-Yue Jin ◽

James R. Morrison

Keyword(s):

Cluster Tools ◽

Residency Constraints

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Optimal scheduling analysis of treelike hybrid multi-cluster tools

2016 IEEE International Conference on Automation Science and Engineering (CASE) ◽

10.1109/coase.2016.7743573 ◽

2016 ◽

Author(s):

FaJun Yang ◽

NaiQi Wu ◽

Yan Qiao ◽

MengChu Zhou

Keyword(s):

Optimal Scheduling ◽

Scheduling Analysis ◽

Cluster Tools

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Noncyclic Scheduling of Multi-Cluster Tools With Residency Constraints Based on Pareto Optimization

IEEE Transactions on Semiconductor Manufacturing ◽

10.1109/tsm.2020.2998734 ◽

2020 ◽

Vol 33 (3) ◽

pp. 476-486

Author(s):

Yuanyuan Yan ◽

Huangang Wang ◽

Qinghua Tao ◽

Wenhui Fan ◽

Tingyu Lin ◽

...

Keyword(s):

Pareto Optimization ◽

Cluster Tools ◽

Residency Constraints

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Optimal scheduling of transient cycles for single-armed cluster tools

2013 IEEE International Conference on Automation Science and Engineering (CASE) ◽

10.1109/coase.2013.6653939 ◽

2013 ◽

Cited By ~ 8

Author(s):

Dae-Kyu Kim ◽

Tae-Eog Lee ◽

Hyun-Jung Kim

Keyword(s):

Optimal Scheduling ◽

Cluster Tools

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