Fabrication of single crystal silicon resonators with narrow gaps

The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. ◽

10.1109/sensor.2005.1497332 ◽

2005 ◽

Cited By ~ 6

Author(s):

J. Kiihamaki ◽

V. Kaajakari ◽

H. Luoto ◽

H. Kattelus ◽

M. Yli-Koski

Keyword(s):

Single Crystal ◽

Single Crystal Silicon ◽

Crystal Silicon ◽

Silicon Resonators ◽

Narrow Gaps

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Fully single crystal silicon resonators with deep-submicron dry-etched transducer gaps

17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest ◽

10.1109/mems.2004.1290709 ◽

2004 ◽

Cited By ~ 3

Author(s):

S. Pourkamali ◽

F. Ayazi

Keyword(s):

Single Crystal ◽

Single Crystal Silicon ◽

Deep Submicron ◽

Crystal Silicon ◽

Silicon Resonators

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Ovenized dual-mode clock (ODMC) based on highly doped single crystal silicon resonators

2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) ◽

10.1109/memsys.2016.7421565 ◽

2016 ◽

Cited By ~ 17

Author(s):

Yunhan Chen ◽

Eldwin J. Ng ◽

Dongsuk D. Shin ◽

Chae H. Ahn ◽

Yushi Yang ◽

...

Keyword(s):

Single Crystal ◽

Single Crystal Silicon ◽

Dual Mode ◽

Crystal Silicon ◽

Silicon Resonators

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Voltage-tunable piezoelectrically-transduced single-crystal silicon resonators on SOI substrate

The Sixteenth Annual International Conference on Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE ◽

10.1109/memsys.2003.1189708 ◽

2003 ◽

Cited By ~ 7

Author(s):

G. Piazza ◽

R. Abdolvand ◽

F. Ayazi

Keyword(s):

Single Crystal ◽

Single Crystal Silicon ◽

Crystal Silicon ◽

Silicon Resonators

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Highly decoupled single-crystal silicon resonators: an approach for the intrinsic quality factor

Journal of Micromechanics and Microengineering ◽

10.1088/0960-1317/16/6/s08 ◽

2006 ◽

Vol 16 (6) ◽

pp. S45-S53 ◽

Cited By ~ 41

Author(s):

Baptiste Le Foulgoc ◽

Tarik Bourouina ◽

Olivier Le Traon ◽

Alain Bosseboeuf ◽

Frédéric Marty ◽

...

Keyword(s):

Single Crystal ◽

Quality Factor ◽

Single Crystal Silicon ◽

Crystal Silicon ◽

Intrinsic Quality ◽

Silicon Resonators

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Time-Resolved Micro-Raman Stress Spectroscopy for Single-Crystal Silicon Resonators Using a MEMS Optical Chopper

Journal of Microelectromechanical Systems ◽

10.1109/jmems.2015.2503723 ◽

2016 ◽

Vol 25 (1) ◽

pp. 188-196 ◽

Cited By ~ 3

Author(s):

Toshiyuki Tsuchiya ◽

Yusuke Kogita ◽

Akira Taniyama ◽

Yoshikazu Hirai ◽

Koji Sugano ◽

...

Keyword(s):

Single Crystal ◽

Single Crystal Silicon ◽

Crystal Silicon ◽

Time Resolved ◽

Silicon Resonators

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SOI-based HF and VHF single-crystal silicon resonators with SUB-100 nanometer vertical capacitive gaps

TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) ◽

10.1109/sensor.2003.1215604 ◽

2004 ◽

Cited By ~ 18

Author(s):

S. Pourkamali ◽

F. Ayazi

Keyword(s):

Single Crystal ◽

Single Crystal Silicon ◽

Crystal Silicon ◽

Silicon Resonators

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Fully monolithic and ultra-compact NEMS-CMOS self-oscillator based-on single-crystal silicon resonators and low-cost CMOS circuitry

2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) ◽

10.1109/memsys.2014.6765830 ◽

2014 ◽

Cited By ~ 6

Author(s):

Julien Philippe ◽

Gregory Arndt ◽

Eric Colinet ◽

Mylene Savoye ◽

Thomas Ernst ◽

...

Keyword(s):

Single Crystal ◽

Low Cost ◽

Single Crystal Silicon ◽

Crystal Silicon ◽

Silicon Resonators

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Stability of wafer level vacuum encapsulated single-crystal silicon resonators

The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. ◽

10.1109/sensor.2005.1496567 ◽

2005 ◽

Cited By ~ 10

Author(s):

V. Kaajakari ◽

J. Kiihamaki ◽

A. Oja ◽

H. Sepp ◽

S. Pietikainen ◽

...

Keyword(s):

Single Crystal ◽

Single Crystal Silicon ◽

Wafer Level ◽

Crystal Silicon ◽

Silicon Resonators

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MODE- AND DIRECTION-DEPENDENT AKHIEZER DAMPING IN SINGLE-CRYSTAL SILICON RESONATORS

2016 Solid-State, Actuators, and Microsystems Workshop Technical Digest ◽

10.31438/trf.hh2016.114 ◽

2016 ◽

Author(s):

S.S. Iyer ◽

R.N. Candler

Keyword(s):

Single Crystal ◽

Single Crystal Silicon ◽

Crystal Silicon ◽

Silicon Resonators

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Selective Coating Deposition on High-Q Single-crystal Silicon Resonators for the Investigation of Thermal Noise Statistical Properties

Procedia Engineering ◽

10.1016/j.proeng.2014.11.579 ◽

2014 ◽

Vol 87 ◽

pp. 1485-1488 ◽

Cited By ~ 1

Author(s):

E. Serra ◽

M. Bonaldi ◽

A. Borrielli ◽

L. Conti ◽

G. Pandraud ◽

...

Keyword(s):

Single Crystal ◽

Thermal Noise ◽

Single Crystal Silicon ◽

Statistical Properties ◽

Crystal Silicon ◽

Coating Deposition ◽

Selective Coating ◽

High Q ◽

Silicon Resonators

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