scholarly journals Stability of wafer level vacuum encapsulated single-crystal silicon resonators

2005 ◽  
Author(s):  
V. Kaajakari ◽  
J. Kiihamaki ◽  
A. Oja ◽  
H. Sepp ◽  
S. Pietikainen ◽  
...  
Keyword(s):  
Single Crystal ◽  
Single Crystal Silicon ◽  
Wafer Level ◽  
Crystal Silicon ◽  
Silicon Resonators

scholarly journals Stability of wafer level vacuum encapsulated single-crystal silicon resonators

2006 ◽  
Vol 130-131 ◽  
pp. 42-47 ◽  
Author(s):  
Ville Kaajakari ◽  
Jyrki Kiihamäki ◽  
Aarne Oja ◽  
Sami Pietikäinen ◽  
Ville Kokkala ◽  
...  
Keyword(s):  
Single Crystal ◽  
Single Crystal Silicon ◽  
Wafer Level ◽  
Crystal Silicon ◽  
Silicon Resonators

Highly decoupled single-crystal silicon resonators: an approach for the intrinsic quality factor

2006 ◽  
Vol 16 (6) ◽  
pp. S45-S53 ◽  
Author(s):  
Baptiste Le Foulgoc ◽  
Tarik Bourouina ◽  
Olivier Le Traon ◽  
Alain Bosseboeuf ◽  
Frédéric Marty ◽  
...  
Keyword(s):  
Single Crystal ◽  
Quality Factor ◽  
Single Crystal Silicon ◽  
Crystal Silicon ◽  
Intrinsic Quality ◽  
Silicon Resonators

Time-Resolved Micro-Raman Stress Spectroscopy for Single-Crystal Silicon Resonators Using a MEMS Optical Chopper

2016 ◽  
Vol 25 (1) ◽  
pp. 188-196 ◽  
Author(s):  
Toshiyuki Tsuchiya ◽  
Yusuke Kogita ◽  
Akira Taniyama ◽  
Yoshikazu Hirai ◽  
Koji Sugano ◽  
...  
Keyword(s):  
Single Crystal ◽  
Single Crystal Silicon ◽  
Crystal Silicon ◽  
Time Resolved ◽  
Silicon Resonators

BCB-based wafer-level packaged single-crystal silicon multi-port RF MEMS switch

2008 ◽  
Vol 44 (2) ◽  
pp. 118 ◽  
Author(s):  
J.-M. Kim ◽  
S. Lee ◽  
C.-W. Baek ◽  
Y. Kwon ◽  
Y.-K. Kim
Keyword(s):  
Single Crystal ◽  
Rf Mems ◽  
Single Crystal Silicon ◽  
Wafer Level ◽  
Crystal Silicon ◽  
Rf Mems Switch ◽  
Mems Switch
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