SOI-based HF and VHF single-crystal silicon resonators with SUB-100 nanometer vertical capacitive gaps

2004 ◽  
Author(s):  
S. Pourkamali ◽  
F. Ayazi
Keyword(s):  
Single Crystal ◽  
Single Crystal Silicon ◽  
Crystal Silicon ◽  
Silicon Resonators

Highly decoupled single-crystal silicon resonators: an approach for the intrinsic quality factor

2006 ◽  
Vol 16 (6) ◽  
pp. S45-S53 ◽  
Author(s):  
Baptiste Le Foulgoc ◽  
Tarik Bourouina ◽  
Olivier Le Traon ◽  
Alain Bosseboeuf ◽  
Frédéric Marty ◽  
...  
Keyword(s):  
Single Crystal ◽  
Quality Factor ◽  
Single Crystal Silicon ◽  
Crystal Silicon ◽  
Intrinsic Quality ◽  
Silicon Resonators

Time-Resolved Micro-Raman Stress Spectroscopy for Single-Crystal Silicon Resonators Using a MEMS Optical Chopper

2016 ◽  
Vol 25 (1) ◽  
pp. 188-196 ◽  
Author(s):  
Toshiyuki Tsuchiya ◽  
Yusuke Kogita ◽  
Akira Taniyama ◽  
Yoshikazu Hirai ◽  
Koji Sugano ◽  
...  
Keyword(s):  
Single Crystal ◽  
Single Crystal Silicon ◽  
Crystal Silicon ◽  
Time Resolved ◽  
Silicon Resonators
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