Simulation of Atmospheric Pressure Methane-Hydrogen Microdischarge for Diamond Like Carbon (DLC) Film Deposition

2007 ◽  
Author(s):  
Tanvir Farouk ◽  
Bakhtier Farouk ◽  
Alexander Gutsol ◽  
Alexander Fridman
Keyword(s):  
Atmospheric Pressure ◽  
Film Deposition ◽  
Diamond Like Carbon ◽  
Dlc Film

Diamond-like Carbon Film Deposition on an Artificial Heart Blood Pump Using a Flexible Type Electrode with r.f. Plasma CVD Processing

2006 ◽  
Vol 956 ◽  
Author(s):  
Kazuya Kanasugi ◽  
Yasuharu Ohgoe ◽  
Katsuya Tsuchimoto ◽  
Keisuke Sato ◽  
Kenji K. Hirakuri ◽  
...  
Keyword(s):  
Artificial Heart ◽  
Carbon Film ◽  
Film Coating ◽  
Film Structure ◽  
Film Deposition ◽  
Blood Pump ◽  
Diamond Like Carbon ◽  
Dlc Film ◽  
Self Bias ◽  
Heart Blood

ABSTRACTDiamond-like carbon (DLC) film was deposited uniformly on an irregular structure such as a polyurethane artificial heart blood pump using a special 3-dimensional type electrode. Process of applying the DLC film coating is accomplished by inserting a large number of small metallic balls (φ0.8 mm chromium balls). It is then possible to adjust the shape of the electrode in such a way that the DLC film coating can be applied to the irregular surface of the artificial heart. In investigating the availability of the electrode, under helium (He) plasma, the plasma states were measured using double probe analysis. Lateral profiles of the electron temperature were higher in the centre and decreased towards the edges of the electrode. On the other hand, the plasma density profiles were lower in the centre part than at the edges. The electrode kept ion sheath on the artificial heart blood pump's surface at self-bias voltage uniformly. The results were that the DLC film was deposited completely on the artificial heart blood pump at the film thickness of approximately 350 - 380 nm. Additionally the film structure was uniform.

The Formation of Diamond-Like Carbon Film at Atmospheric Pressure by the Pulsed Laser/Plasma Hybrid Deposition Method

2011 ◽  
Vol 110-116 ◽  
pp. 3737-3741
Author(s):  
Han Pei Wang ◽  
Jehn Ming Lin
Keyword(s):  
Plasma Flow ◽  
Laser Plasma ◽  
Atmospheric Pressure ◽  
Carbon Film ◽  
Carbon Particle ◽  
Pulsed Laser ◽  
Scratch Test ◽  
Diamond Like Carbon ◽  
Deposition Method ◽  
Dlc Film

A pulsed laser/plasma hybrid deposition method has been developed to produce the diamond-like carbon (DLC) film at atmospheric pressure in this work. A plasma torch was used to heat up the carbon particles which were simultaneously ablated by a pulsed laser, thus the kinetic energy of the carbon particle can be increased to form the carbon atoms with amorphous bonding structure of the DLC film. The influences of the plasma flow have been examined at various inlet pressures. According to the experimental results of the carbon film inspected by the Raman spectroscopy, it reveals that the intensity ratio of the D-band to G-band of the carbon film can be reduced to 0.5 by the implementation of plasma flow. Therefore the DLC film was solidly formed. The adhesive strength of the DLC film was also characterized by the scratch test, it can be found that the critical loading of the film on the iron substrate is up to 19 N.

Effects of O2 Gas Addition on Diamond-Like Carbon Film Deposition

1999 ◽  
Vol 593 ◽  
Author(s):  
N. Nakamura ◽  
T. Itani ◽  
H. Chiba ◽  
K. Watanabe ◽  
K. Kurihara
Keyword(s):  
Carbon Film ◽  
Disk Drive ◽  
Film Deposition ◽  
Diamond Like Carbon ◽  
Mixing Ratio ◽  
Gas Mixing ◽  
Dc Magnetron Sputtering ◽  
Graphite Target ◽  
Dlc Film

ABSTRACTThe role of 02 gas addition on the deposition of Diamond-like Carbon (DLC) film was studied for hard disk drive (HDD) media application. The influence of 02 gas mixing ratio on DLC film quality was investigated using the dc magnetron sputtering method with a solid graphite target and Ar, CH4 and 02 mixing gases. The 02 mixing ratio was varied between 0% and 50%. Film quality was evaluated using Raman spectroscopy and XPS. When 02 gas mixing ratio increased the peak in Raman spectra shifted gradually to higher wavenumbers and its bandwidth became narrower. This indicates graphite component increased in the DLC film. In addition, the lubricant coverage on oxygen-containing DLC was improved. Because adding oxygen increases the terminations of carbonyl group on DLC surface, this result suggests that the polar surface causes higher affinity for the lubricant

Deposition and Tribological Properties of CVD Diamond/Diamond-Like Carbon Composite Films

2012 ◽  
Vol 565 ◽  
pp. 615-620
Author(s):  
Bin Shen ◽  
Liang Wang ◽  
Su Lin Chen ◽  
Fang Hong Sun
Keyword(s):  
Surface Morphology ◽  
Composite Film ◽  
Tribological Properties ◽  
Composite Films ◽  
Cvd Diamond ◽  
Carbon Composite ◽  
Dry Sliding ◽  
Diamond Like Carbon ◽  
Dlc Film ◽  
Bonding State

The CVD diamond/diamond-like carbon composite film is fabricated on the WC-Co substrate by depositing a layer of Diamond-like Carbon film on the surface of conventional Micro- or Nano-crystalline diamond film. The hot filament chemical vapor deposition (HFCVD) method and vacuum arc discharge with a graphite cathode are adopted respectively to deposit the MCD/NCD and DLC films. A variety of characterization techniques, including filed emission scanning electron microscope (FE-SEM) and Raman spectroscopy are employed to investigate the surface morphology and atomic bonding state of as-deposited MCD/DLC and NCD/DLC composite film. The results show that both MCD/DLC and NCD/DLC composite films present similar surface morphology with the MCD and NCD films, except for scattering a considerable amount of small-sized diamond crystallites among the grain boundary area. The atomic-bonding state of as-deposited MCD/DLC and NCD/DLC composite films is determined by the top-layered DLC film, which is mainly consisted of amorphous carbon phase and no discernible sp3 characteristic peak can be observed from their Raman spectrum. Furthermore, the tribological properties of as-deposited MCD/DLC and NCD/DLC composite films is examined using a ball-on-plate reciprocating friction tester under both dry sliding and water-lubricating conditions, comparing with conventional DLC, MCD and NCD films. Silicon nitride balls are used as counterpart materials. For the CVD diamond/DLC composite films, the self-lubricating effect of top-layered DLC film is beneficial for suppressing the initial friction peak, as well as shortening the run-in period. The average friction coefficients of MCD/DLC and NCD/DLC composite films during stable sliding period are 0.07 and 0.10 respectively in dry sliding; while under water-lubricating condition, they further decreases to 0.03 and 0.07.

Deposition of diamond-like carbon

1993 ◽  
Vol 342 (1664) ◽  
pp. 277-286 ◽  
Keyword(s):  
Thin Film ◽  
Amorphous Carbon ◽  
Thin Film Deposition ◽  
Film Deposition ◽  
Diamond Like Carbon ◽  
Hydrogenated Amorphous Carbon ◽  
Sizeable Fraction ◽  
Deposition Processes ◽  
Hydrogenated Amorphous

Diamond-like carbon refers to forms of amorphous carbon and hydrogenated amorphous carbon containing a sizeable fraction of sp 3 bonding, which makes them mechanically hard, infrared transparent and chemically inert. This paper discusses the various thin film deposition processes used to form diamond-like carbon and the deposition mechanisms responsible for promoting the metastable sp 3 bonding.

Atmospheric Pressure Low Temperature Direct Plasma Technology: Status and Challenges for Thin Film Deposition

2012 ◽  
Vol 9 (11-12) ◽  
pp. 1041-1073 ◽  
Author(s):  
Francoise Massines ◽  
Christian Sarra-Bournet ◽  
Fiorenza Fanelli ◽  
Nicolas Naudé ◽  
Nicolas Gherardi
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Atmospheric Pressure ◽  
Thin Film Deposition ◽  
Film Deposition ◽  
Plasma Technology

MULTILAYERS DIAMOND-LIKE CARBON FILM WITH GERMANIUM BUFFER LAYERS BY PULSED LASER DEPOSITION

2017 ◽  
Vol 24 (02) ◽  
pp. 1750014 ◽  
Author(s):  
Y. CHENG ◽  
Y. M. LU ◽  
Y. L. GUO ◽  
G. J. HUANG ◽  
S. Y. WANG ◽  
...  
Keyword(s):  
Critical Load ◽  
Carbon Film ◽  
High Hardness ◽  
Buffer Layers ◽  
Diamond Like Carbon ◽  
Dlc Film ◽  
Diamond Like Carbon Film ◽  
Film Hardness ◽  
Protective Films ◽  
Germanium Substrate

Multilayer diamond-like carbon film with germanium buffer layers, which was composed of several thick DLC layers and thin germanium island “layers” and named as Ge-DLC film, was prepared on the germanium substrate by ultraviolet laser. The Ge-DLC film had almost same surface roughness as the pure DLC film. Hardness of the Ge-DLC film was above 48.1[Formula: see text]GPa, which was almost the same as that of pure DLC film. Meanwhile, compared to the pure DLC film, the critical load of Ge-DLC film on the germanium substrate increased from 81.6[Formula: see text]mN to 143.8[Formula: see text]mN. Moreover, Ge-DLC film on germanium substrates had no change after fastness tests. The results showed that Ge-DLC film not only kept high hardness but also had higher critical load than that of pure DLC film. Therefore, it could be used as practical protective films.

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