Particle simulation of CH[sub 4]/H[sub 2] RF glow discharges for DLC film deposition

Simulation of Atmospheric Pressure Methane-Hydrogen Microdischarge for Diamond Like Carbon (DLC) Film Deposition

2007 IEEE 34th International Conference on Plasma Science (ICOPS) ◽

10.1109/ppps.2007.4345814 ◽

2007 ◽

Author(s):

Tanvir Farouk ◽

Bakhtier Farouk ◽

Alexander Gutsol ◽

Alexander Fridman

Keyword(s):

Atmospheric Pressure ◽

Film Deposition ◽

Diamond Like Carbon ◽

Dlc Film

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Particle Simulation Methods for Glow Discharges: Past, Present and Future, with Applications

Electron Kinetics and Applications of Glow Discharges - NATO Science Series: B ◽

10.1007/0-306-47076-4_4 ◽

2006 ◽

pp. 59-74

Author(s):

Charles K. Birdsall ◽

Emi Kawamura ◽

Vahid Vahedi

Keyword(s):

Particle Simulation ◽

Simulation Methods ◽

Glow Discharges

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Carbon shunting arc and its induced plasma and DLC film deposition

IEEE Conference Record - Abstracts. 1999 IEEE International Conference on Plasma Science. 26th IEEE International Conference (Cat. No.99CH36297) ◽

10.1109/plasma.1999.829525 ◽

2003 ◽

Author(s):

K. Yukimura ◽

R. Isono ◽

K. Yoshioka

Keyword(s):

Film Deposition ◽

Dlc Film

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Simulation of an atmospheric pressure methane-hydrogen micro-discharge for diamond like carbon (DLC) film deposition

2007 IEEE Pulsed Power Plasma Science Conference ◽

10.1109/ppps.2007.4651943 ◽

2007 ◽

Author(s):

T. Farouk ◽

B. Farouk ◽

A. Gutsol ◽

A. Fridman

Keyword(s):

Atmospheric Pressure ◽

Film Deposition ◽

Diamond Like Carbon ◽

Dlc Film

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Experimental study of hydrogen-free DLC film deposition by XeCl (308 nm) pulsed laser ablation

10.1117/12.376977 ◽

2000 ◽

Author(s):

Tie-jun Li ◽

Jingru Liu ◽

Li-ge Wang

Keyword(s):

Experimental Study ◽

Laser Ablation ◽

Pulsed Laser ◽

Pulsed Laser Ablation ◽

Film Deposition ◽

Dlc Film

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Thin film deposition in glow discharges fed with hexamethyldisilazane-oxygen mixtures

Plasma Sources Science and Technology ◽

10.1088/0963-0252/2/2/006 ◽

1993 ◽

Vol 2 (2) ◽

pp. 106-111 ◽

Cited By ~ 20

Author(s):

F Fracassi ◽

R d'Agostino ◽

P Favia ◽

M van Sambeck

Keyword(s):

Thin Film ◽

Thin Film Deposition ◽

Film Deposition ◽

Glow Discharges

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Shadowgraphic studies of DLC film deposition process in dense plasma focus device

The 30th International Conference on Plasma Science, 2003. ICOPS 2003. IEEE Conference Record - Abstracts. ◽

10.1109/plasma.2003.1230048 ◽

2003 ◽

Author(s):

L.Y. Soh ◽

P. Lee ◽

X. Shuyan ◽

S. Lee ◽

R.S. Rawat

Keyword(s):

Plasma Focus ◽

Dense Plasma ◽

Deposition Process ◽

Film Deposition ◽

Plasma Focus Device ◽

Dense Plasma Focus ◽

Dlc Film

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DLC film deposition by Laser-Arc and study of properties

Thin Solid Films ◽

10.1016/0040-6090(94)90737-4 ◽

1994 ◽

Vol 246 (1-2) ◽

pp. 92-102 ◽

Cited By ~ 87

Author(s):

H.-J. Scheibe ◽

B. Schultrich

Keyword(s):

Film Deposition ◽

Dlc Film

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COMPARISON OF IRRADIATION EFFECTS BETWEEN CLUSTER AND MONOMER FOR DLC FILM DEPOSITION

Novel Materials Processing by Advanced Electromagnetic Energy Sources ◽

10.1016/b978-008044504-5/50050-7 ◽

2005 ◽

pp. 245-248

Author(s):

Teruyuki Kitagawa ◽

Noriaki Toyoda ◽

Harushige Tsubakino ◽

Jiro Matsuo ◽

Isao Yamada

Keyword(s):

Film Deposition ◽

Irradiation Effects ◽

Dlc Film

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Characteristics of Carbon Ion Implantation and DLC Film Deposition on Co-Cr-Mo Alloy

Orthopedics & Traumatology ◽

10.5035/nishiseisai.56.69 ◽

2007 ◽

Vol 56 (1) ◽

pp. 69-72

Author(s):

Hironobu Koseki ◽

Koumei Baba

Keyword(s):

Ion Implantation ◽

Film Deposition ◽

Carbon Ion ◽

Dlc Film

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