Effects of O2 Gas Addition on Diamond-Like Carbon Film Deposition

1999 ◽  
Vol 593 ◽  
Author(s):  
N. Nakamura ◽  
T. Itani ◽  
H. Chiba ◽  
K. Watanabe ◽  
K. Kurihara

ABSTRACTThe role of 02 gas addition on the deposition of Diamond-like Carbon (DLC) film was studied for hard disk drive (HDD) media application. The influence of 02 gas mixing ratio on DLC film quality was investigated using the dc magnetron sputtering method with a solid graphite target and Ar, CH4 and 02 mixing gases. The 02 mixing ratio was varied between 0% and 50%. Film quality was evaluated using Raman spectroscopy and XPS. When 02 gas mixing ratio increased the peak in Raman spectra shifted gradually to higher wavenumbers and its bandwidth became narrower. This indicates graphite component increased in the DLC film. In addition, the lubricant coverage on oxygen-containing DLC was improved. Because adding oxygen increases the terminations of carbonyl group on DLC surface, this result suggests that the polar surface causes higher affinity for the lubricant

2006 ◽  
Vol 956 ◽  
Author(s):  
Kazuya Kanasugi ◽  
Yasuharu Ohgoe ◽  
Katsuya Tsuchimoto ◽  
Keisuke Sato ◽  
Kenji K. Hirakuri ◽  
...  

ABSTRACTDiamond-like carbon (DLC) film was deposited uniformly on an irregular structure such as a polyurethane artificial heart blood pump using a special 3-dimensional type electrode. Process of applying the DLC film coating is accomplished by inserting a large number of small metallic balls (φ0.8 mm chromium balls). It is then possible to adjust the shape of the electrode in such a way that the DLC film coating can be applied to the irregular surface of the artificial heart. In investigating the availability of the electrode, under helium (He) plasma, the plasma states were measured using double probe analysis. Lateral profiles of the electron temperature were higher in the centre and decreased towards the edges of the electrode. On the other hand, the plasma density profiles were lower in the centre part than at the edges. The electrode kept ion sheath on the artificial heart blood pump's surface at self-bias voltage uniformly. The results were that the DLC film was deposited completely on the artificial heart blood pump at the film thickness of approximately 350 - 380 nm. Additionally the film structure was uniform.


2017 ◽  
Vol 24 (02) ◽  
pp. 1750014 ◽  
Author(s):  
Y. CHENG ◽  
Y. M. LU ◽  
Y. L. GUO ◽  
G. J. HUANG ◽  
S. Y. WANG ◽  
...  

Multilayer diamond-like carbon film with germanium buffer layers, which was composed of several thick DLC layers and thin germanium island “layers” and named as Ge-DLC film, was prepared on the germanium substrate by ultraviolet laser. The Ge-DLC film had almost same surface roughness as the pure DLC film. Hardness of the Ge-DLC film was above 48.1[Formula: see text]GPa, which was almost the same as that of pure DLC film. Meanwhile, compared to the pure DLC film, the critical load of Ge-DLC film on the germanium substrate increased from 81.6[Formula: see text]mN to 143.8[Formula: see text]mN. Moreover, Ge-DLC film on germanium substrates had no change after fastness tests. The results showed that Ge-DLC film not only kept high hardness but also had higher critical load than that of pure DLC film. Therefore, it could be used as practical protective films.


2013 ◽  
Vol 745-746 ◽  
pp. 60-65
Author(s):  
Nan Yu Ma ◽  
Dan Zeng ◽  
Yu Jie Huang ◽  
Jun Wei Di ◽  
Mu Sen Li

Ag nanoparticles (NPs) have prominent local surface plasma resonance effect (LSPR), and Ag NPs exhibit sharpest and strongest bands among all metals. Diamond-like carbon (DLC) film have good biological compatibility and also have high transmissibility in the visible and near-infrared region. A new LSPR interface between Ag NPs and ultra-thin DLC film was formed by Plasma Enhanced Chemical Vapor Deposition. The morphologies and properties of the Ag NPs coated with DLC film were studied with SEM and AFM. The results indicated that the thickness of DLC film increased with the deposition time. LSPR peak became sharper after depositing for 1 or 2 min. DLC film was prior to nucleate on the surface of Ag NPs, and it has high content of sp2 bonds near the interface. The sensitivity of new LSPR interface deposited for 20s was about the half of the sensitivity of bare Ag NPs and the sensitivity significantly decreased with deposition time. This result is helpful to understand the behavior of the new LSPR interface and to improve its sensitivity.


2000 ◽  
Vol 131 (1-3) ◽  
pp. 20-25 ◽  
Author(s):  
D Korzec ◽  
G Fedosenko ◽  
A Georg ◽  
J Engemann

2017 ◽  
Vol 749 ◽  
pp. 70-75
Author(s):  
Xia Zhu ◽  
Kazuki Kubo ◽  
Hiromichi Toyota ◽  
Shinfuku Nomura ◽  
Yukiharu Iwamoto ◽  
...  

Diamond-like-carbon (DLC) films are promising as coating materials. Ion plating, an excellent method in terms of adhesiveness, step coverage, and deposition rate, can form not only pure metal films but also oxide films, nitride films, and carbonized films. In this study, which aimed to form a DLC film with good adhesiveness and a diamond crystal structure, a DLC film, with a SiC interlayer formed by ion plating with introduction of tetramethylsilane (TMS), was formed. It was experimentally revealed that as the interlayer thickness increases, the crystal structure in the DLC film becomes more diamond rich, and the adhesiveness of the DLC film and substrate is thereby improved.


2008 ◽  
Vol 1138 ◽  
Author(s):  
Yasuharu Ohgoe ◽  
Haruki Matsuo ◽  
Kazuhiro Nonaka ◽  
Toshiyuki Yaguchi ◽  
Kazuya Kanasugi ◽  
...  

AbstractIn this study, we focus on effect of diamond-like carbon (DLC) coating on scaffold for tissue engineering. DLC film was deposited on segmented polyurethane (SPU) scaffold sheet which consists of micro SUP fibers. Structural and compositional effects of the DLC film coating were investigated on cell growth as an investigation of biological response. The surface composition, morphology, structures, and wettability of the DLC film coating was estimated by using X-ray photoelectron spectrometer (XPS), Scanning Electron Microscope (SEM), Ar-laser Raman spectrophotometer (Raman), and contact angle measurement. And then, human umbilical vein endothelial (HUV-EC-C) cells were grown on the DLC coated scaffold sheet. The results presented here suggest that DLC film coating is promising approach to improve biological for tissue engineering.


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