Aluminum Nitride Contour-Mode Vibrating RF MEMS

2006 ◽  
Author(s):  
Gianluca Piazza ◽  
Philip Stephanou ◽  
Albert Pisano
Keyword(s):  
Aluminum Nitride ◽  
Rf Mems ◽  
Contour Mode

Aluminum Nitride reconfigurable RF-MEMS front-ends

2011 ◽  
Author(s):  
Augusto Tazzoli ◽  
Matteo Rinaldi ◽  
Chengjie Zuo ◽  
Nipun Sinha ◽  
Jan Van Der Spiegel ◽  
...  
Keyword(s):  
Aluminum Nitride ◽  
Rf Mems

Dynamic Q-enhancement in aluminum nitride contour-mode resonators

2019 ◽  
Vol 115 (17) ◽  
pp. 173504 ◽  
Author(s):  
Changting Xu ◽  
Abhay Kochhar ◽  
Gianluca Piazza
Keyword(s):  
Aluminum Nitride ◽  
Contour Mode

scholarly journals Wafer-level packaging of aluminum nitride RF MEMS filters

2015 ◽  
Author(s):  
M. David Henry ◽  
Travis Young ◽  
Andrew E. Hollowell ◽  
Matt Eichenfield ◽  
Roy H. Olsson
Keyword(s):  
Aluminum Nitride ◽  
Rf Mems ◽  
Wafer Level ◽  
Wafer Level Packaging

Piezoelectric aluminum nitride MEMS annular dual contour mode filter

2007 ◽  
Vol 134 (1) ◽  
pp. 152-160 ◽  
Author(s):  
Philip J. Stephanou ◽  
Gianluca Piazza ◽  
Carolyn D. White ◽  
Muthu B.J. Wijesundara ◽  
Albert P. Pisano
Keyword(s):  
Aluminum Nitride ◽  
Contour Mode

scholarly journals Two-port stacked piezoelectric aluminum nitride contour-mode resonant MEMS

2007 ◽  
Vol 136 (2) ◽  
pp. 638-645 ◽  
Author(s):  
Gianluca Piazza ◽  
Albert P. Pisano
Keyword(s):  
Aluminum Nitride ◽  
Contour Mode
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