Thick aluminum nitride contour-mode resonators mitigate thermoelastic damping

2016 IEEE International Frequency Control Symposium (IFCS) ◽

10.1109/fcs.2016.7546790 ◽

2016 ◽

Cited By ~ 2

Author(s):

Cristian Cassella ◽

Gianluca Piazza

Keyword(s):

Aluminum Nitride ◽

Thermoelastic Damping ◽

Contour Mode

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Low motional resistance ring-shaped contour-mode aluminum nitride piezoelectric micromeckanical resonators for UHF applications

18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005. ◽

10.1109/memsys.2005.1453857 ◽

2005 ◽

Cited By ~ 28

Author(s):

G. Piazza ◽

P.J. Stephanou ◽

J.M. Porter ◽

M.B.J. Wijesundara ◽

A.P. Pisano

Keyword(s):

Aluminum Nitride ◽

Motional Resistance ◽

Contour Mode

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Dynamic Q-enhancement in aluminum nitride contour-mode resonators

Applied Physics Letters ◽

10.1063/1.5115437 ◽

2019 ◽

Vol 115 (17) ◽

pp. 173504 ◽

Cited By ~ 1

Author(s):

Changting Xu ◽

Abhay Kochhar ◽

Gianluca Piazza

Keyword(s):

Aluminum Nitride ◽

Contour Mode

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Thermoelastic damping in the contour-mode vibrations of micro- and nano-electromechanical circular thin-plate resonators

Journal of Sound and Vibration ◽

10.1016/j.jsv.2007.11.035 ◽

2008 ◽

Vol 313 (1-2) ◽

pp. 77-96 ◽

Cited By ~ 41

Author(s):

Zhili Hao

Keyword(s):

Thin Plate ◽

Thermoelastic Damping ◽

Contour Mode ◽

Circular Thin Plate

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Monolithic integration of phase change materials and aluminum nitride contour-mode MEMS resonators for highly reconfigurable radio frequency systems

10.17760/d20194504 ◽

2015 ◽

Author(s):

Gwendolyn Eve Hummel

Keyword(s):

Aluminum Nitride ◽

Radio Frequency ◽

Phase Change ◽

Phase Change Materials ◽

Monolithic Integration ◽

Mems Resonators ◽

Reconfigurable Radio ◽

Contour Mode ◽

Radio Frequency Systems

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Vector network analyzer measurements of frequency fluctuations in aluminum nitride contour-mode resonators

2013 Joint European Frequency and Time Forum & International Frequency Control Symposium (EFTF/IFC) ◽

10.1109/eftf-ifc.2013.6702257 ◽

2013 ◽

Cited By ~ 3

Author(s):

Nicholas Miller ◽

Gianluca Piazza

Keyword(s):

Aluminum Nitride ◽

Vector Network Analyzer ◽

Network Analyzer ◽

Frequency Fluctuations ◽

Contour Mode

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Thermoelastic Damping in the Electrodes Determines $Q$ of AlN Contour Mode Resonators

Journal of Microelectromechanical Systems ◽

10.1109/jmems.2017.2672962 ◽

2017 ◽

Vol 26 (3) ◽

pp. 550-558 ◽

Cited By ~ 14

Author(s):

Jeronimo Segovia-Fernandez ◽

Gianluca Piazza

Keyword(s):

Thermoelastic Damping ◽

Contour Mode

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Piezoelectric aluminum nitride MEMS annular dual contour mode filter

Sensors and Actuators A Physical ◽

10.1016/j.sna.2006.04.032 ◽

2007 ◽

Vol 134 (1) ◽

pp. 152-160 ◽

Cited By ~ 20

Author(s):

Philip J. Stephanou ◽

Gianluca Piazza ◽

Carolyn D. White ◽

Muthu B.J. Wijesundara ◽

Albert P. Pisano

Keyword(s):

Aluminum Nitride ◽

Contour Mode

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Two-port stacked piezoelectric aluminum nitride contour-mode resonant MEMS

Sensors and Actuators A Physical ◽

10.1016/j.sna.2006.12.003 ◽

2007 ◽

Vol 136 (2) ◽

pp. 638-645 ◽

Cited By ~ 29

Author(s):

Gianluca Piazza ◽

Albert P. Pisano

Keyword(s):

Aluminum Nitride ◽

Contour Mode

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Piezoelectric Aluminum Nitride Vibrating Contour-Mode MEMS Resonators

Journal of Microelectromechanical Systems ◽

10.1109/jmems.2006.886012 ◽

2006 ◽

Vol 15 (6) ◽

pp. 1406-1418 ◽

Cited By ~ 393

Author(s):

Gianluca Piazza ◽

Philip J. Stephanou ◽

Albert P. Pisano

Keyword(s):

Aluminum Nitride ◽

Mems Resonators ◽

Contour Mode

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Nanoscaled piezoelectric aluminum nitride contour-mode resonant sensors

2010 IEEE Sensors ◽

10.1109/icsens.2010.5690615 ◽

2010 ◽

Cited By ~ 2

Author(s):

Gianluca Piazza ◽

Matteo Rinaldi ◽

Chiara Zuniga

Keyword(s):

Aluminum Nitride ◽

Resonant Sensors ◽

Contour Mode

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