Feasibility study of aperiodic backreflectors for thin film Si solar cells with focused ion beam lithography

2014 ◽  
Author(s):  
A. Micco ◽  
A. Ricciardi ◽  
M. Pisco ◽  
A. Cusano ◽  
V. La Ferrara ◽  
...  
Keyword(s):  
Thin Film ◽  
Solar Cells ◽  
Feasibility Study ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Ion Beam Lithography ◽  
Si Solar Cells

Grazing Incidence Cross-Sectioning of Thin-Film Solar Cells via Cryogenic Focused Ion Beam: A Case Study on CIGSe

2016 ◽  
Vol 8 (24) ◽  
pp. 14994-14999 ◽  
Author(s):  
Kasra Sardashti ◽  
Richard Haight ◽  
Ryan Anderson ◽  
Miguel Contreras ◽  
Bernd Fruhberger ◽  
...  
Keyword(s):  
Thin Film ◽  
Solar Cells ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Grazing Incidence ◽  
Thin Film Solar Cells

Microstructures of GaAs fabricated by finely focused ion beam lithography

1989 ◽  
Vol 9 (1-4) ◽  
pp. 277-279 ◽  
Author(s):  
Takao Shiokawa ◽  
Pil Hyon Kim ◽  
Manabu Hamagaki ◽  
Tamio Hara ◽  
Yoshinobu Aoyagi ◽  
...  
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Ion Beam Lithography

Boron nitride stamp for ultra-violet nanoimprinting lithography fabricated by focused ion beam lithography

2007 ◽  
Vol 18 (46) ◽  
pp. 465302 ◽  
Author(s):  
Ali Ozhan Altun ◽  
Jun-Ho Jeong ◽  
Jong-Joo Rha ◽  
Ki-Don Kim ◽  
Eung-Sug Lee
Keyword(s):  
Boron Nitride ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Ultra Violet ◽  
Ion Beam Lithography

Fabrication of Sub-250nm High Aspect Ratio Apertures by Focused Ion Beam Lithography

2006 ◽  
Vol 983 ◽  
Author(s):  
Todd Simpson ◽  
Ian V Mitchell
Keyword(s):  
Silicon Nitride ◽  
High Resolution ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Gold Films ◽  
Ion Beam Lithography ◽  
Diameter Hole ◽  
Sem Imaging ◽  
Aperture Arrays

AbstractAperture arrays were fabricated in 1.0µm thick gold films supported on 20nm thick silicon nitride membranes. Lithographic milling strategies in gold were evaluated through the use of in-situ sectioning and high resolution SEM imaging with the UWO CrossBeam FIB/SEM. A successful strategy for producing a 250nm diameter hole with sidewalls approaching vertical is summarized.

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