Study on ultra-thin NEMS cantilevers - high yield fabrication and size-effect on Young's modulus of silicon
1994 ◽
Vol 13
(10)
◽
pp. 703-704
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2017 ◽
Vol 214
(4)
◽
pp. 1600390
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2009 ◽
Vol 46
(3)
◽
pp. 744-748
◽
Keyword(s):
2021 ◽
Vol 76
◽
pp. 122-128
Keyword(s):