Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266)

Characterization of a micromachined inchworm motor with thermoelastic linkage actuators

Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266) ◽

10.1109/memsys.2002.984339 ◽

2003 ◽

Author(s):

Ho Nam Kwon ◽

Jong Hyun Lee

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Micro-power wireless transmitter for high-temperature MEMS sensing and communication applications

Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266) ◽

10.1109/memsys.2002.984352 ◽

2003 ◽

Cited By ~ 6

Author(s):

M. Suster ◽

D.J. Young ◽

W.H. Ko

Keyword(s):

High Temperature ◽

Wireless Transmitter ◽

Micro Power

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A hybrid Silicon-On-Glass (SOG) lateral micro-accelerometer with CMOS readout circuitry

Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266) ◽

10.1109/memsys.2002.984348 ◽

2003 ◽

Cited By ~ 6

Author(s):

Junseok Chae ◽

H. Kulah ◽

K. Najafi

Keyword(s):

Hybrid Silicon ◽

Micro Accelerometer

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Conformal grating electromechanical system (GEMS) for high-speed digital light modulation

Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266) ◽

10.1109/memsys.2002.984335 ◽

2003 ◽

Cited By ~ 9

Author(s):

M.W. Kowarz ◽

J.C. Brazas ◽

J.G. Phalen

Keyword(s):

High Speed ◽

Electromechanical System ◽

Light Modulation

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Investigation of the hermeticity of BCB-sealed cavities for housing (RF-)MEMS devices

Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266) ◽

10.1109/memsys.2002.984361 ◽

2003 ◽

Cited By ~ 52

Author(s):

A. Jourdain ◽

P. De Moor ◽

S. Pamidighantam ◽

H.A.C. Tilmans

Keyword(s):

Rf Mems ◽

Mems Devices

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A scanning micromirror with angular comb drive actuation

Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266) ◽

10.1109/memsys.2002.984329 ◽

2003 ◽

Cited By ~ 38

Author(s):

P.R. Patterson ◽

Dooyoung Hah ◽

Hung Nguyen ◽

H. Toshiyoshi ◽

Ru-min Chao ◽

...

Keyword(s):

Comb Drive

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An integrated micro-optical system for laser-to-fiber active alignment

Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266) ◽

10.1109/memsys.2002.984316 ◽

2003 ◽

Cited By ~ 4

Author(s):

K. Ishikawa ◽

Jianglong Zhang ◽

A. Tuantranont ◽

V.M. Bright ◽

Yung-Cheng Lee

Keyword(s):

Optical System

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A magnetic force driven chaotic micro-mixer

Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266) ◽

10.1109/memsys.2002.984076 ◽

2003 ◽

Cited By ~ 16

Author(s):

H. Suzuki ◽

Chih-Ming Ho

Keyword(s):

Magnetic Force ◽

Micro Mixer

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Non-contact batch micro-assembly by centrifugal force

Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266) ◽

10.1109/memsys.2002.984235 ◽

2003 ◽

Cited By ~ 9

Author(s):

K.W.C. Lai ◽

A.P. Hui ◽

W.J. Li

Keyword(s):

Centrifugal Force ◽

Micro Assembly

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Electrostatically levitated spherical 3-axis accelerometer

Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266) ◽

10.1109/memsys.2002.984369 ◽

2003 ◽

Cited By ~ 20

Author(s):

R. Toda ◽

N. Takeda ◽

T. Murakoshi ◽

S. Nakamura ◽

M. Esashi

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Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266)
Latest Publications

TOTAL DOCUMENTS

H-INDEX

Published By IEEE

Characterization of a micromachined inchworm motor with thermoelastic linkage actuators

Micro-power wireless transmitter for high-temperature MEMS sensing and communication applications

A hybrid Silicon-On-Glass (SOG) lateral micro-accelerometer with CMOS readout circuitry

Conformal grating electromechanical system (GEMS) for high-speed digital light modulation

Investigation of the hermeticity of BCB-sealed cavities for housing (RF-)MEMS devices

A scanning micromirror with angular comb drive actuation

An integrated micro-optical system for laser-to-fiber active alignment

A magnetic force driven chaotic micro-mixer

Non-contact batch micro-assembly by centrifugal force

Electrostatically levitated spherical 3-axis accelerometer

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Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266)Latest Publications

TOTAL DOCUMENTS

H-INDEX

Published By IEEE

Characterization of a micromachined inchworm motor with thermoelastic linkage actuators

Micro-power wireless transmitter for high-temperature MEMS sensing and communication applications

A hybrid Silicon-On-Glass (SOG) lateral micro-accelerometer with CMOS readout circuitry

Conformal grating electromechanical system (GEMS) for high-speed digital light modulation

Investigation of the hermeticity of BCB-sealed cavities for housing (RF-)MEMS devices

A scanning micromirror with angular comb drive actuation

An integrated micro-optical system for laser-to-fiber active alignment

A magnetic force driven chaotic micro-mixer

Non-contact batch micro-assembly by centrifugal force

Electrostatically levitated spherical 3-axis accelerometer

Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266)
Latest Publications