Size effect of Young's modulus in AlN thin layers

2014 ◽  
Vol 116 (12) ◽  
pp. 124306 ◽  
Author(s):  
Bernd Hähnlein ◽  
Peter Schaaf ◽  
Jörg Pezoldt
2021 ◽  
Author(s):  
Juan C Acosta ◽  
Mark E Curtis ◽  
Carl H Sondergeld ◽  
Chandra S Rai

Abstract Volcanic ash beds are thin layers commonly observed in the Eagle Ford, Niobrara and, Vaca Muerta formations. Because of their differences in composition, sedimentary structures, and diagenetic alteration, they exhibit a significant contrast in mechanical properties with respect to surrounding formation layers. This can impact hydraulic fracturing, affecting fracture propagation and fracture geometry. Quantifying the mechanical properties of ash beds becomes significant; however, it is a challenge with traditional testing methods. Common logging fails to identify the ash beds, and core plug testing is not possible because of their friability. In this study, nanoindentation was used to measure the mechanical properties (Young's modulus, creep, and anisotropy) in Eagle Ford ash beds, and to determine the contrast with the formation matrix properties. Two separate ash beds of high clay and plagioclase composition were epoxied in an aluminum tray and left for 48 hours curing time. Horizontal and vertical samples of ash beds were acquired and mounted on a metal stub, followed by polishing and broad beam ion milling. Adjacent samples were also prepared for high-resolution Scanning Electron Microscope (SEM) microstructural analysis. The Young's modulus in ash beds ranged from 12 to 24 GPa, with the horizontal direction Young's modulus being slightly greater than that of the vertical samples. The Young's modulus contrast with adjacent layers was calculated to be 1:2 with clay-rich zones and 1:4 with calcite rich zones. The creep deformation rate was three times higher for ash beds compared to other zones. Using Backus averaging, it was determined that the presence of ash beds can increase the anisotropy in the formation by 15-25%. SEM results showed a variation in microstructure between the ash beds with evidence of diagenetic conversion of rhyolitic material into clays. Key differences between the two ash beds were due to the presence of plagioclase and the occurrence of porosity within kaolinite. Overall porosity varied between the two ash beds and adjacent carbonate layers showing a significant increase in porosity. Understanding the moduli contrast between adjacent layers can improve the hydraulic fracturing design when ash beds are encountered. In addition, the presence of these beds can lead to proppant embedment and loss in fracture connectivity. These results can be used for improving geomechanical models.


1996 ◽  
Vol 438 ◽  
Author(s):  
J. A. Knapp ◽  
D. M. Follstaedt ◽  
J. C. Barbour ◽  
S. M. Myers ◽  
J. W. Ager ◽  
...  

AbstractWe present a methodology based on finite-element modeling of nanoindentation data to extract reliable and accurate mechanical properties from thin, hard films and surface-modified layers on softer substrates. The method deduces the yield stress, Young's modulus, and hardness from indentations as deep as 50% of the layer thickness.


2004 ◽  
Vol 85 (16) ◽  
pp. 3555-3557 ◽  
Author(s):  
S. G. Nilsson ◽  
X. Borrisé ◽  
L. Montelius

Micromachines ◽  
2021 ◽  
Vol 12 (9) ◽  
pp. 1072
Author(s):  
Sergio Sapienza ◽  
Matteo Ferri ◽  
Luca Belsito ◽  
Diego Marini ◽  
Marcin Zielinski ◽  
...  

3C-SiC is an emerging material for MEMS systems thanks to its outstanding mechanical properties (high Young’s modulus and low density) that allow the device to be operated for a given geometry at higher frequency. The mechanical properties of this material depend strongly on the material quality, the defect density, and the stress. For this reason, the use of SiC in Si-based microelectromechanical system (MEMS) fabrication techniques has been very limited. In this work, the complete characterization of Young’s modulus and residual stress of monocrystalline 3C-SiC layers with different doping types grown on <100> and <111> oriented silicon substrates is reported, using a combination of resonance frequency of double clamped beams and strain gauge. In this way, both the residual stress and the residual strain can be measured independently, and Young’s modulus can be obtained by Hooke’s law. From these measurements, it has been observed that Young’s modulus depends on the thickness of the layer, the orientation, the doping, and the stress. Very good values of Young’s modulus were obtained in this work, even for very thin layers (thinner than 1 mm), and this can give the opportunity to realize very sensitive strain sensors.


Proceedings ◽  
2018 ◽  
Vol 2 (8) ◽  
pp. 553
Author(s):  
Atsumi Ohtsuki

An innovative mechanical testing method (Compressive Circular Ring Method) is provided for measuring Young’s modulus of each layer in a flexible multi-layered material. The method is based on a nonlinear large deformation theory. By just measuring the vertical displacement or the horizontal displacement of the ring, Young’s modulus of each layer can be easily obtained for various thin multi-layered materials. Measurements were carried out on an electrodeposited twolayered wire. The results confirm that the new method is suitable for flexible multi-layered thin wires. In the meantime, the new method can be applied widely to measure Young’s modulus of thin layers formed by PVD, CVD, Coating, Paint, Cladding, Lamination, and others.


Soft Matter ◽  
2016 ◽  
Vol 12 (7) ◽  
pp. 2200-2207 ◽  
Author(s):  
Baptiste Sarrazin ◽  
Rémy Brossard ◽  
Patrick Guenoun ◽  
Florent Malloggi

As the need of new methods for the investigation of thin films on various kinds of substrates becomes greater, a novel approach based on AFM nanoindentation is explored. In particular, a successful method for the investigation of thin layers on soft substrates is demonstrated.


2017 ◽  
Vol 30 (1) ◽  
pp. 10-13
Author(s):  
Jacobo Esteban Munguia Cevantes ◽  
Juan Vicente Méndez Méndez ◽  
Hector Francisco Mendoza León ◽  
Miguel Ángel Alemán Arce ◽  
Salvador Mendoza Acevedo ◽  
...  

Stylus surface profiler has been widely used in order to measure Young’s modulus of silicon nitride (Si3N4) from microcantilever beams. Until now, several Si3N4 Young’s modulus values have been reported. It may be due to incomplete assessment of the microcantilever beams bending over its entire length or a lack of calibration of the stylus force system used in those works. We presented in this work an alternative method to measure the elastic modulus of MEMS thin layers in a rather accurate manner. A stylus force calibration is reported from a calibrated silicon microcantilever beam in order to measure the Si3N4 Young’s modulus. We reported Si3N4 Young´s modulus from three microcantilever beams, with values of 219.4 ± 0.6 GPa, 230.1 ± 3.4 GPa and 222 ± 11 GPa for 50 µm, 100 µm and 200 µm wide respectively, which are in good agreement with respect to the Si3N4 Young´s modulus which have been determined by other methods.


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