A simple profilometer for film thickness measurement

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Vol 64 (8) ◽  
pp. 2405-2406 ◽  
Author(s):  
J. W. Wood ◽  
R. D. Redin
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Qinggang Liu ◽  
Chong Yue ◽  
Yaopu Lang ◽  
Xinglin Zhou

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Author(s):  
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