Plasma Enhanced Atomic Layer Deposition Passivated HfO2/AlN/In0.53Ga0.47As MOSCAPs With Sub-Nanometer Equivalent Oxide Thickness and Low Interface Trap Density

2015 ◽  
Vol 36 (12) ◽  
pp. 1277-1280 ◽  
Author(s):  
Quang Ho Luc ◽  
Huy Binh Do ◽  
Minh Thien Huu Ha ◽  
Chenming Calvin Hu ◽  
Yueh Chin Lin ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Oxide Thickness ◽  
Trap Density ◽  
Interface Trap Density ◽  
Interface Trap ◽  
Equivalent Oxide Thickness ◽  
Layer Deposition

scholarly journals Heteroepitaxy of La2O3 and La2–xYxO3 on GaAs (111)A by Atomic Layer Deposition: Achieving Low Interface Trap Density

Nano Letters ◽  
2013 ◽  
Vol 13 (2) ◽  
pp. 594-599 ◽  
Author(s):  
Xinwei Wang ◽  
Lin Dong ◽  
Jingyun Zhang ◽  
Yiqun Liu ◽  
Peide D. Ye ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Trap Density ◽  
Interface Trap Density ◽  
Interface Trap ◽  
Layer Deposition

Interface Trap Density Reduction for Al2O3/GaN (0001) Interfaces by Oxidizing Surface Preparation prior to Atomic Layer Deposition

2015 ◽  
Vol 7 (23) ◽  
pp. 12774-12780 ◽  
Author(s):  
Dmitry M. Zhernokletov ◽  
Muhammad A. Negara ◽  
Rathnait D. Long ◽  
Shaul Aloni ◽  
Dennis Nordlund ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Surface Preparation ◽  
Atomic Layer ◽  
Trap Density ◽  
Interface Trap Density ◽  
Interface Trap ◽  
Density Reduction ◽  
Layer Deposition

Low interface trap density in scaled bilayer gate oxides on 2D materials via nanofog low temperature atomic layer deposition

2019 ◽  
Vol 463 ◽  
pp. 758-766 ◽  
Author(s):  
Iljo Kwak ◽  
Mahmut Kavrik ◽  
Jun Hong Park ◽  
Larry Grissom ◽  
Bernd Fruhberger ◽  
...  
Keyword(s):  
Low Temperature ◽  
Atomic Layer Deposition ◽  
2D Materials ◽  
Atomic Layer ◽  
Trap Density ◽  
Interface Trap Density ◽  
Interface Trap ◽  
Gate Oxides ◽  
Layer Deposition

Scaling to Sub-1 nm Equivalent Oxide Thickness with Hafnium Oxide Deposited by Atomic Layer Deposition

2006 ◽  
Vol 153 (8) ◽  
pp. F180 ◽  
Author(s):  
Annelies Delabie ◽  
Matty Caymax ◽  
Bert Brijs ◽  
David P. Brunco ◽  
Thierry Conard ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Hafnium Oxide ◽  
Atomic Layer ◽  
Oxide Thickness ◽  
Equivalent Oxide Thickness ◽  
Layer Deposition
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