Comparison of electrical and reliability characteristics of different 14 /spl Aring/ oxynitride gate dielectrics
2002 ◽
Vol 23
(7)
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pp. 416-418
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2003 ◽
Vol 66
(1-4)
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pp. 643-647
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Keyword(s):
2007 ◽
Vol 20
(4)
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pp. 476-481
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2005 ◽
Vol 5
(2)
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pp. 168-176
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Keyword(s):