Nitrogen ion dose dependence of surface morphology of titanium nitride films deposited on gallium arsenide by an ion beam assisted deposition technique

Author(s):  
K. Yokota ◽  
K. Nakamura ◽  
M. Satoh ◽  
T. Sugimoto ◽  
K. Akamatsu ◽  
...  
2016 ◽  
Vol 185 ◽  
pp. 295-298 ◽  
Author(s):  
Lin-Ao Zhang ◽  
Hao-Nan Liu ◽  
Xiao-Xia Suo ◽  
Shuo Tong ◽  
Ying-Lan Li ◽  
...  

1996 ◽  
Vol 283 (1-2) ◽  
pp. 182-187
Author(s):  
S Mohajerzadeh ◽  
C.R Selvakumar ◽  
D.E Brodie ◽  
M.D Robertson ◽  
J.M Corbett

1990 ◽  
Vol 67 (2) ◽  
pp. 1134-1136 ◽  
Author(s):  
J. S. Lee ◽  
C. S. Park ◽  
J. W. Yang ◽  
J. Y. Kang ◽  
D. S. Ma

2016 ◽  
Vol 2016 ◽  
pp. 1-9 ◽  
Author(s):  
Petr Vlcak ◽  
Ivan Jirka

The microstructure and the surface properties of samples coated by carbon-based nanolayer were investigated in an effort to increase the surface hardness and reduce the coefficient of friction of the Ti6Al4V alloy. Protective carbon-based nanolayers were fabricated by argon or nitrogen ion-beam assisted deposition at ion energy of 700 eV on Ti6Al4V substrates. The Raman spectra indicated that nanolayers had a diamond-like carbon character with sp2rich bonds. The TiC and TiN compounds formed in the surface area were detected by X-ray diffraction. Nanoscratch tests showed increased adhesion of a carbon-based nanolayer deposited with ion assistance in comparison with a carbon nanolayer deposited without ion assistance. The results showed that argon ion assistance leads to greater nanohardness than a sample coated by a carbon-based nanolayer with nitrogen ion assistance. A more than twofold increase in nanohardness and a more than fivefold decrease in the coefficient of friction were obtained for samples coated by a carbon-based nanolayer with ion assistance, in comparison with the reference sample.


1996 ◽  
Vol 84 (1-3) ◽  
pp. 439-442 ◽  
Author(s):  
A. Königer ◽  
J.W. Gerlach ◽  
H. Wengenmair ◽  
C. Hammerl ◽  
J. Hartmann ◽  
...  

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