Prototyping and characterization of radiation hardened SiC MOS structures

Author(s):  
Francesco Pintacuda ◽  
Vincenzo Cantarella ◽  
Michele Muschitiello ◽  
Silvia Massetti
2000 ◽  
Vol 639 ◽  
Author(s):  
D. Mistele ◽  
T. Rotter ◽  
R. Ferretti ◽  
F. Fedler ◽  
H. Klausing ◽  
...  

ABSTRACTPhotoanodically grown Ga2O3 layers were characterized with respect to their suitability as gate dielectrics for GaN based MOSFET Device applications. The Ga2O3 layers were produced in a photoelectrochemical cell using aqueous solutions of KOH. IV characterization of MOS structures show insulating behavior of the oxide layers and CV measurements indicate a small density of states at the oxide/GaN interface. Integrating the wet chemical oxide growth in a MOSFET device fabricating process includes tungsten as gate metal together with H2O2 as etching solution for the gate metal. Source/drain areas were made free of oxide by the alkaline developer of a conventional lithographic step and metallization was done by using the liftoff technique. MOS structures show no inversion mode but strong depletion in reverse biasing mode.


Author(s):  
Garry Berkovic ◽  
Shlomi Zilberman ◽  
Ehud Shafir ◽  
Yosef London ◽  
M. Dadon ◽  
...  

Author(s):  
Geraldine Chaumont ◽  
Benoit Cornanguer ◽  
Patrick Briand ◽  
Christophe Prugne ◽  
Florence Malou

1982 ◽  
Vol 89 (4) ◽  
pp. 401-406 ◽  
Author(s):  
Y. Shapira ◽  
J. Bregman ◽  
Z. Calahorra ◽  
R. Goshen

Vacuum ◽  
2008 ◽  
Vol 82 (11) ◽  
pp. 1203-1207 ◽  
Author(s):  
A. Tataroğlu ◽  
Ş. Altındal

1991 ◽  
Vol 38 (6) ◽  
pp. 1289-1296 ◽  
Author(s):  
D.C. Pantelakis ◽  
D.F. Hemmenway ◽  
N.W. van Vonno ◽  
T.J. Sanders

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