scholarly journals Variable Frequency Microwave Curing of Polymer Materials in Microelectronics Packaging Applications

2007 ◽  
Author(s):  
T. Tilford ◽  
K.I. Sinclair ◽  
G. Goussetis ◽  
C. Bailey ◽  
M.P.Y. Desmulliez ◽  
...  
Keyword(s):  
Polymer Materials ◽  
Variable Frequency ◽  
Microelectronics Packaging ◽  
Microwave Curing ◽  
Curing Of Polymer

In Situ Acoustic Temperature Measurement During Variable-Frequency Microwave Curing

2008 ◽  
Vol 31 (4) ◽  
pp. 273-284 ◽  
Author(s):  
Cleon E. Davis ◽  
Anthony J. Dickherber ◽  
William D. Hunt ◽  
Gary S. May
Keyword(s):  
Temperature Measurement ◽  
Variable Frequency ◽  
Microwave Curing

Variable frequency microwave curing of photosensitive polyimides

2001 ◽  
Vol 24 (3) ◽  
pp. 474-481 ◽  
Author(s):  
K.D. Famsworth ◽  
R.N. Manepalli ◽  
S.A. Bidstrup-Allen ◽  
P.A. Kohl
Keyword(s):  
Variable Frequency ◽  
Microwave Curing

scholarly journals Microwave Curing of Non-Traditional Polymer Materials Used in Manufacture of Injection Moulds

2011 ◽  
Vol 338 ◽  
pp. 214-222 ◽  
Author(s):  
Prasad K.D.V. Yarlagadda ◽  
Andre Poh ◽  
Shu Hau Hsu
Keyword(s):  
Glass Transition ◽  
Cost Effective ◽  
Polymer Processing ◽  
Polymer Materials ◽  
Curing Time ◽  
Efficient Manner ◽  
Microwave Curing ◽  
Maximum Percentage ◽  
Materials Used ◽  
New Generation

Microwave heating technology is a cost-effective alternative way for heating and curing of used in polymer processing of various alternate materials. The work presented in this paper addresses the attempts made by the authors to study the glass transition temperature and curing of materials such as casting resins R2512, R2515 and laminating resin GPR 2516 in combination with two hardeners ADH 2403 and ADH 2409. The magnetron microwave generator used in this research is operating at a frequency of 2.45 GHz with a hollow rectangular waveguide. During this investigation it has been noted that microwave heated mould materials resulted with higher glass transition temperatures and better microstructure. It also noted that Microwave curing resulted in a shorter curing time to reach the maximum percentage cure. From this study it can be concluded that microwave technology can be efficiently and effectively used to cure new generation alternate polymer materials for manufacture of injection moulds in a rapid and efficient manner. Microwave curing resulted in a shorter curing time to reach the maximum percentage cure.

Variable Frequency Microwave Curing of SU8 Photoresist Films

2014 ◽  
Vol 931-932 ◽  
pp. 101-105
Author(s):  
Christian Antonio ◽  
Piyachat Watanachai
Keyword(s):  
Heat Transfer ◽  
Poor Quality ◽  
Variable Frequency ◽  
Degree Of Cure ◽  
Microwave Curing ◽  
Micro Cracks ◽  
Negative Tone ◽  
Cure Rates ◽  
Pattern Resolution ◽  
Similar Processing

Photoresist used in the fabrication of Microelectrochemical Systems (MEMS) has traditionally been processed using conventional curing technology. This type of curing is often time intensive and results in non-uniform products. A uniform bake of the layer is not always possible due to the mechanisms of heat transfer conventional curing offers, leading to poor pattern resolution, formation of micro-cracks and severe outgassing occurring as a consequence. The Variable Frequency Microwave (VFM) Technique was successfully utilised in this study as an alternative method for the processing of negative tone SU8 photoresist. The VFM method was compared to the conventional processing method, which utilises a Hotplate, and a hybrid method utilizing both Hotplate and the VFM and found that an increase on the degree of cure was observed using the VFM at similar processing temperatures which means that SU8 curing at lower temperatures or rapid curing is possible. The increase in cure rates can be attributed to a combination of heat transfer and the unique capability of microwave to couple with the sample. Optical studies of the microstructures fabricated suggest that films that have a degree of cure of <60% resulted in poor quality microstructures. The VFM was found to achieve satisfactory microstructures at most of the temperatures tested as compared to the other two methods tested.

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