Improved quality factor spiral inductors on GaAs substrates

1999 ◽  
Vol 9 (10) ◽  
pp. 398-400 ◽  
Author(s):  
I.J. Bahl
Keyword(s):  
Quality Factor ◽  
Gaas Substrates ◽  
Spiral Inductors

Double-Level Spiral Inductors With Multiple-Via Interconnects on GaAs Substrates

2004 ◽  
Vol 40 (3) ◽  
pp. 1756-1758 ◽  
Author(s):  
W.-Y. Yin ◽  
S.-J. Pan ◽  
L.-W. Li
Keyword(s):  
Gaas Substrates ◽  
Spiral Inductors

Spiral Inductors with Multi-Strip Coils Processed on Sapphire and Bulk Silicon Substrates

2004 ◽  
Vol 1 (4) ◽  
pp. 206-216
Author(s):  
Päivi H. Karjalainen ◽  
Juha Rapelo ◽  
Eero O. Ristolainen
Keyword(s):  
Quality Factor ◽  
Element Model ◽  
Silicon Substrates ◽  
Lumped Element ◽  
Strip Layout ◽  
Determining Factors ◽  
Inductor Coil ◽  
Spiral Inductors ◽  
Lumped Element Model ◽  
Line Space

Improvements in inductor properties are demonstrated using inductors fabricated by the SOS and CMOS processes. Inductor coils are constructed in the form of several separate strips and the effect of the coil layout on the inductance and quality factor is examined with respect to traditional (“un-slit”) inductors. Optimized multi-strip layout increases the inductance and the quality factor of an inductor. The coil layout has very little influence on the self-resonance frequency of the inductor. Multi-strip layout of the inductor coil increases the coil's series resistance, which in conjunction with the proximity effect causes the critical frequency to increase. The number of slits, the spacing between coils, and the width of the slits are the determining factors for improving the inductor characteristics when using a multi-strip arrangement. The layout produces an improvement especially in the case of SOS inductors. A ladder-type lumped element model for multi-strip inductors is presented. (The words “strip/slit” are equivalent to “track/space” or “line/space”)

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