Fabrication of InGaAsP/InP buried heterostructure laser using reactive ion etching and metalorganic chemical vapor deposition

B.-T. Lee; R.A. Logan; R.F. Kalicek; A.M. Sergent; D.L. Coblentz; K.W. Wecht; T. Tanbun-Ek

doi:10.1109/68.205611

Fabrication of InGaAsP/InP buried heterostructure laser using reactive ion etching and metalorganic chemical vapor deposition

IEEE Photonics Technology Letters ◽

10.1109/68.205611 ◽

1993 ◽

Vol 5 (3) ◽

pp. 279-281 ◽

Cited By ~ 19

Author(s):

B.-T. Lee ◽

R.A. Logan ◽

R.F. Kalicek ◽

A.M. Sergent ◽

D.L. Coblentz ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Reactive Ion Etching ◽

Chemical Vapor ◽

Ion Etching ◽

Heterostructure Laser ◽

Buried Heterostructure ◽

Metalorganic Chemical

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Low‐threshold 1.3‐μm GaInAsP/InP buried heterostructure lasers by liquid phase epitaxy and metalorganic chemical vapor deposition

Applied Physics Letters ◽

10.1063/1.92697 ◽

1981 ◽

Vol 39 (3) ◽

pp. 188-189 ◽

Cited By ~ 5

Author(s):

Willie Ng ◽

C. S. Hong ◽

H. Manasevit ◽

P. D. Dapkus

Keyword(s):

Chemical Vapor Deposition ◽

Liquid Phase ◽

Liquid Phase Epitaxy ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Buried Heterostructure ◽

Low Threshold ◽

Metalorganic Chemical

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GaAs surface emitting lasers with circular buried heterostructure grown by metalorganic chemical vapor deposition and two‐dimensional laser array

Applied Physics Letters ◽

10.1063/1.99405 ◽

1988 ◽

Vol 52 (7) ◽

pp. 528-529 ◽

Cited By ~ 31

Author(s):

Fumio Koyama ◽

Kazuhiko Tomomatsu ◽

Kenichi Iga

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Two Dimensional ◽

Laser Array ◽

Surface Emitting Lasers ◽

Buried Heterostructure ◽

Emitting Lasers ◽

Metalorganic Chemical

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Interface Recombination Reduction by (NH4)2Sx-Passivation in Metalorganic Chemical Vapor Deposition Regrown GaAlAs/GaAs Buried Heterostructure Lasers and Estimation of Threshold Currents in Microcavity Surface Emitting Lasers

Japanese Journal of Applied Physics ◽

10.1143/jjap.31.3292 ◽

1992 ◽

Vol 31 (Part 1, No. 10) ◽

pp. 3292-3295 ◽

Cited By ~ 14

Author(s):

Takemasa Tamanuki ◽

Fumio Koyama ◽

Kenichi Iga

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Interface Recombination ◽

Surface Emitting Lasers ◽

Buried Heterostructure ◽

Emitting Lasers ◽

Metalorganic Chemical

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InGaAs‐GaAs strained‐layer quantum well buried heterostructure lasers (λ>1 μm) by metalorganic chemical vapor deposition

Applied Physics Letters ◽

10.1063/1.100935 ◽

1989 ◽

Vol 54 (6) ◽

pp. 499-501 ◽

Cited By ~ 70

Author(s):

P. K. York ◽

K. J. Beernink ◽

G. E. Fernández ◽

J. J. Coleman

Keyword(s):

Chemical Vapor Deposition ◽

Quantum Well ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Strained Layer ◽

Buried Heterostructure ◽

Metalorganic Chemical

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Room‐temperature continuous‐wave operation of an AlGaInP double heterostructure laser grown by atmospheric pressure metalorganic chemical vapor deposition

Applied Physics Letters ◽

10.1063/1.96366 ◽

1985 ◽

Vol 47 (10) ◽

pp. 1027-1028 ◽

Cited By ~ 106

Author(s):

Masao Ikeda ◽

Yoshifumi Mori ◽

Hiromitsu Sato ◽

Kunio Kaneko ◽

Naozo Watanabe

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Atmospheric Pressure ◽

Room Temperature ◽

Metalorganic Chemical Vapor Deposition ◽

Continuous Wave ◽

Chemical Vapor ◽

Heterostructure Laser ◽

Continuous Wave Operation ◽

Metalorganic Chemical

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Single mode laser with a V‐shaped active layer grown by metalorganic chemical vapor deposition: A v‐shaped double heterostructure laser

Journal of Applied Physics ◽

10.1063/1.329522 ◽

1981 ◽

Vol 52 (9) ◽

pp. 5429-5433 ◽

Cited By ~ 6

Author(s):

Yoshifumi Mori ◽

Osamu Matsuda ◽

Naozo Watanabe

Keyword(s):

Chemical Vapor Deposition ◽

Active Layer ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Single Mode ◽

Mode Laser ◽

Single Mode Laser ◽

Heterostructure Laser ◽

Metalorganic Chemical

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626.2‐nm pulsed operation (300 K) of an AlGaInP double heterostructure laser grown by metalorganic chemical vapor deposition

Applied Physics Letters ◽

10.1063/1.95804 ◽

1985 ◽

Vol 46 (1) ◽

pp. 7-9 ◽

Cited By ~ 19

Author(s):

Kenichi Kobayashi ◽

Isao Hino ◽

Tohru Suzuki

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Double Heterostructure ◽

Heterostructure Laser ◽

Metalorganic Chemical

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Yellow‐emitting AlGaInP double heterostructure laser diode at 77 K grown by atmospheric metalorganic chemical vapor deposition

Applied Physics Letters ◽

10.1063/1.95459 ◽

1984 ◽

Vol 45 (9) ◽

pp. 964-966 ◽

Cited By ~ 27

Author(s):

M. Ikeda ◽

M. Honda ◽

Y. Mori ◽

K. Kaneko ◽

N. Watanabe

Keyword(s):

Chemical Vapor Deposition ◽

Laser Diode ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Double Heterostructure ◽

Heterostructure Laser ◽

Metalorganic Chemical

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Planar‐embedded InGaAsP/InP heterostructure laser with a semi‐insulating InP current‐blocking layer grown by metalorganic chemical vapor deposition

Applied Physics Letters ◽

10.1063/1.98789 ◽

1987 ◽

Vol 51 (14) ◽

pp. 1054-1056 ◽

Cited By ~ 39

Author(s):

T. Sanada ◽

K. Nakai ◽

K. Wakao ◽

M. Kuno ◽

S. Yamakoshi

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Blocking Layer ◽

Heterostructure Laser ◽

Current Blocking Layer ◽

Current Blocking ◽

Metalorganic Chemical

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Metalorganic chemical vapor deposition of InGaAsP/InP layers and fabrication of 1.3‐μm planar buried heterostructure lasers

Journal of Applied Physics ◽

10.1063/1.341411 ◽

1988 ◽

Vol 64 (7) ◽

pp. 3684-3688 ◽

Cited By ~ 2

Author(s):

T. Kawabata ◽

H. Ishiguro ◽

S. Koike

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Buried Heterostructure ◽

Metalorganic Chemical

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