Plasma charging damage on MOS devices with gate insulator of high-dielectric constant material

2001 ◽  
Vol 22 (11) ◽  
pp. 527-529 ◽  
Author(s):  
Pei-Jer Tzeng ◽  
Yi-Yuan Chang ◽  
Kuei-Shu Chang-Liao
2004 ◽  
Vol 95 (1) ◽  
pp. 316-322 ◽  
Author(s):  
Guangming Wang ◽  
Daniel Moses ◽  
Alan J. Heeger ◽  
Hong-Mei Zhang ◽  
Mux Narasimhan ◽  
...  

2007 ◽  
Vol 16 (4) ◽  
pp. 1145-1149 ◽  
Author(s):  
Lü Wen ◽  
Peng Jun-Biao ◽  
Yang Kai-Xia ◽  
Lan Lin-Feng ◽  
Niu Qiao-Li ◽  
...  

2020 ◽  
Vol 8 (32) ◽  
pp. 16661-16668
Author(s):  
Huayao Tu ◽  
Shouzhi Wang ◽  
Hehe Jiang ◽  
Zhenyan Liang ◽  
Dong Shi ◽  
...  

The carbon fiber/metal oxide/metal oxynitride layer sandwich structure is constructed in the electrode to form a mini-plate capacitor. High dielectric constant metal oxides act as dielectric to increase their capacitance.


Sign in / Sign up

Export Citation Format

Share Document