Development and electrical properties of undoped polycrystalline silicon thin-film transistors

R.E. Proano; R.S. Misage; D.G. Ast

doi:10.1109/16.34270

Development and electrical properties of undoped polycrystalline silicon thin-film transistors

IEEE Transactions on Electron Devices ◽

10.1109/16.34270 ◽

1989 ◽

Vol 36 (9) ◽

pp. 1915-1922 ◽

Cited By ~ 205

Author(s):

R.E. Proano ◽

R.S. Misage ◽

D.G. Ast

Keyword(s):

Thin Film ◽

Electrical Properties ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

Silicon Thin Film

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Effect of Dopant Concentration in Lightly Doped Drain Region on the Electrical Properties of N-Type Metal Induced Lateral Crystallization Polycrystalline Silicon Thin Film Transistors

Japanese Journal of Applied Physics ◽

10.7567/jjap.52.10mc13 ◽

2013 ◽

Vol 52 (10S) ◽

pp. 10MC13 ◽

Cited By ~ 1

Author(s):

Se Wan Son ◽

Chang Woo Byun ◽

Yong Woo Lee ◽

Seung Jae Yun ◽

Ashkan Vakilipour Takaloo ◽

...

Keyword(s):

Thin Film ◽

Electrical Properties ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

Dopant Concentration ◽

Silicon Thin Film ◽

Drain Region ◽

Lateral Crystallization ◽

Lightly Doped Drain

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The Electrical Properties of Unidirectional Metal-Induced Lateral Crystallized Polycrystalline-Silicon Thin-Film Transistors

IEEE Transactions on Electron Devices ◽

10.1109/ted.2007.896357 ◽

2007 ◽

Vol 54 (6) ◽

pp. 1420-1424 ◽

Cited By ~ 4

Author(s):

Nam-Kyu Song ◽

Min-Sun Kim ◽

Shin-Hee Han ◽

Young-Su Kim ◽

Seung-Ki Joo

Keyword(s):

Thin Film ◽

Electrical Properties ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

Silicon Thin Film

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Oxide‐semiconductor interface roughness and electrical properties of polycrystalline silicon thin‐film transistors

Applied Physics Letters ◽

10.1063/1.111641 ◽

1994 ◽

Vol 64 (17) ◽

pp. 2273-2275 ◽

Cited By ~ 8

Author(s):

Hiroshi Takahashi ◽

Yoshikazu Kojima

Keyword(s):

Thin Film ◽

Electrical Properties ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

Interface Roughness ◽

Oxide Semiconductor ◽

Silicon Thin Film ◽

Semiconductor Interface

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Effect of excimer laser annealing on the structural and electrical properties of polycrystalline silicon thin-film transistors

Journal of Applied Physics ◽

10.1063/1.371409 ◽

1999 ◽

Vol 86 (8) ◽

pp. 4600-4606 ◽

Cited By ~ 70

Author(s):

C. T. Angelis ◽

C. A. Dimitriadis ◽

M. Miyasaka ◽

F. V. Farmakis ◽

G. Kamarinos ◽

...

Keyword(s):

Thin Film ◽

Electrical Properties ◽

Excimer Laser ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

Laser Annealing ◽

Silicon Thin Film ◽

Excimer Laser Annealing ◽

Structural And Electrical Properties

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Electrical Properties of High-κ Praseodymium Oxide Polycrystalline Silicon Thin-Film Transistors with Nitrogen Implantation

Japanese Journal of Applied Physics ◽

10.1143/jjap.47.853 ◽

2008 ◽

Vol 47 (2) ◽

pp. 853-856 ◽

Cited By ~ 1

Author(s):

Chih-Kang Deng ◽

Hong-Ren Chang ◽

Bi-Shiou Chiou

Keyword(s):

Thin Film ◽

Electrical Properties ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

Nitrogen Implantation ◽

Praseodymium Oxide ◽

Silicon Thin Film

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Erratum: “Effect of excimer laser annealing on the structural and electrical properties of polycrystalline silicon thin-film transistors” [J. Appl. Phys. 86, 4600 (1999)]

Journal of Applied Physics ◽

10.1063/1.372060 ◽

2000 ◽

Vol 87 (3) ◽

pp. 1588-1588 ◽

Cited By ~ 2

Author(s):

C. T. Angelis ◽

C. A. Dimitriadis ◽

M. Miyasaka ◽

F. V. Farmakis ◽

G. Kamarinos ◽

...

Keyword(s):

Thin Film ◽

Electrical Properties ◽

Excimer Laser ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

Laser Annealing ◽

Silicon Thin Film ◽

Excimer Laser Annealing ◽

Structural And Electrical Properties

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Thermal Stress Effects on the Electrical Properties of p-Channel Polycrystalline-Silicon Thin-Film Transistors Fabricated via Metal-Induced Lateral Crystallization

IEEE Transactions on Semiconductor Manufacturing ◽

10.1109/tsm.2014.2373353 ◽

2015 ◽

Vol 28 (1) ◽

pp. 35-40 ◽

Cited By ~ 9

Author(s):

Jae Hyo Park ◽

Ki Hwan Seok ◽

Zohreh Kiaee ◽

Hyung Yoon Kim ◽

Hee Jae Chae ◽

...

Keyword(s):

Thin Film ◽

Thermal Stress ◽

Electrical Properties ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

Silicon Thin Film ◽

Stress Effects ◽

Lateral Crystallization

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