NUMERICAL SIMULATION OF THE THERMAL OXIDATION OF POLYCRYSTALLINE SILICON

1993 ◽  
Vol 12 (4) ◽  
pp. 417-422
Author(s):  
G.V. Gadiyak ◽  
J.L. Korobitsina ◽  
V.I. Kramarenko
Keyword(s):  
Numerical Simulation ◽  
Thermal Oxidation ◽  
Polycrystalline Silicon

Optical characterization of polycrystalline silicon before and after thermal oxidation

1985 ◽  
Vol 125 (3-4) ◽  
pp. 235-241 ◽  
Author(s):  
P. Montaudon ◽  
M.H. Debroux ◽  
F. Ferrieu ◽  
A. Vareille
Keyword(s):  
Thermal Oxidation ◽  
Polycrystalline Silicon ◽  
Optical Characterization ◽  
Before And After

Numerical simulation of polycrystalline-Silicon MOSFET's

1986 ◽  
Vol 33 (8) ◽  
pp. 1201-1206 ◽  
Author(s):  
R. Guerrieri ◽  
P. Ciampolini ◽  
A. Gnudi ◽  
M. Rudan ◽  
G. Baccarani
Keyword(s):  
Numerical Simulation ◽  
Polycrystalline Silicon

Numerical simulation of the thermal oxidation of silicon in N2O ambient

1995 ◽  
Vol 38 (5) ◽  
pp. 1113-1114
Author(s):  
G.V Gadiyak ◽  
J.L Korobitsina
Keyword(s):  
Numerical Simulation ◽  
Thermal Oxidation

Numerical simulation of parasitic resistance effects in polycrystalline silicon TFTs

2006 ◽  
Vol 53 (3) ◽  
pp. 573-577 ◽  
Author(s):  
P. Gaucci ◽  
A. Valletta ◽  
L. Mariucci ◽  
G. Fortunato ◽  
S.D. Brotherton
Keyword(s):  
Numerical Simulation ◽  
Polycrystalline Silicon ◽  
Parasitic Resistance
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