scholarly journals Defect formation and diffusion mechanism in ion-assisted molecular-beam epitaxy

1992 ◽  
Vol 46 (11) ◽  
pp. 7103-7109 ◽  
Author(s):  
C. J. Tsai ◽  
T. Vreeland ◽  
H. A. Atwater
2011 ◽  
Vol 295-297 ◽  
pp. 777-780 ◽  
Author(s):  
M. Ajaz Un Nabi ◽  
M. Imran Arshad ◽  
Adnan Ali ◽  
M. Asghar ◽  
M. A Hasan

In this paper we have investigated the substrate-induced deep level defects in bulk GaN layers grown onp-silicon by molecular beam epitaxy. Representative deep level transient spectroscopy (DLTS) performed on Au-GaN/Si/Al devices displayed only one electron trap E1at 0.23 eV below the conduction band. Owing to out-diffusion mechanism; silicon diffuses into GaN layer from Si substrate maintained at 1050°C, E1level is therefore, attributed to the silicon-related defect. This argument is supported by growth of SiC on Si substrate maintained at 1050°C in MBE chamber using fullerene as a single evaporation source.


1992 ◽  
Vol 61 (10) ◽  
pp. 1196-1198 ◽  
Author(s):  
S. H. Shin ◽  
J. M. Arias ◽  
M. Zandian ◽  
J. G. Pasko ◽  
J. Bajaj ◽  
...  

2006 ◽  
Vol 88 (10) ◽  
pp. 101904 ◽  
Author(s):  
D. Dagnelund ◽  
I. A. Buyanova ◽  
T. Mchedlidze ◽  
W. M. Chen ◽  
A. Utsumi ◽  
...  

1994 ◽  
Vol 141 (1-2) ◽  
pp. 109-118 ◽  
Author(s):  
V.I. Vdovin ◽  
M.G. Mil'vidskii ◽  
T.G. Yugova ◽  
K.L. Lyutovich ◽  
S.M. Saidov

2005 ◽  
Vol 39 (5) ◽  
pp. 557-564 ◽  
Author(s):  
G. E. Cirlin ◽  
V. G. Dubrovskii ◽  
N. V. Sibirev ◽  
I. P. Soshnikov ◽  
Yu. B. Samsonenko ◽  
...  

2021 ◽  
Vol 130 (23) ◽  
pp. 235301
Author(s):  
Akhil Mauze ◽  
Yuewei Zhang ◽  
Takeki Itoh ◽  
Thomas E. Mates ◽  
Hartwin Peelaers ◽  
...  

Author(s):  
T. S. Cheng ◽  
C. T. Foxon ◽  
N. J. Jeffs ◽  
D. J. Dewsnip ◽  
L. Flannery ◽  
...  

This paper discusses the growth of Mg-doped GaN samples using a modified Molecular Beam Epitaxy (MBE) method. Our results suggest that the dopant is incorporated from a surface population maintained by the incident Mg flux by a rapid diffusion mechanism. It follows that the chemical concentration will increase with time of growth and that the p-doping level will also increase progressively with film thickness for a given Mg flux. Increasing the Mg flux to the surface results at first in a higher doping density, but this saturates when the Mg surface concentration reaches a finite value.


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