ABSTRACTTwo techniques have been used to measure the velocity of the amorphous-crystalline boundary during scanned laser crystallization of amorphous Ge films on fused-silica substrates. Values in the vicinity of 200 cm sec-1 have been measured by both methods. The results obtained by the first technique, an optical transmission method, confirm our theoretical model for the periodic motion of the boundary. The measurements made by the second technique, which is based on an examination of the structural features obtained at laser scanning rates up to about 600 cm sec-1 , show the boundary velocity to be rather insensitive to film thickness and background temperature. Controlled crystallization is expected to require stability of the laser beam power.
Application of CW Laser Crystallization for Display Devices.