Uniform subwavelength high-aspect ratio nanogratings on metal-protected bulk silicon produced by laser-induced periodic surface structuring
2021 ◽
Vol 119
(21)
◽
pp. 211106
Kirill Bronnikov
◽
Alexander Dostovalov
◽
Vadim Terentyev
◽
Sergey Babin
◽
Aleksey Kozlov
◽
...