[1992] Proceedings IEEE Micro Electro Mechanical Systems
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Published By IEEE

0780304977

Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Temporal evolution of silicon surface roughness during anisotropic etching processes

[1992] Proceedings IEEE Micro Electro Mechanical Systems ◽

10.1109/memsys.1992.187691 ◽

1992 ◽

Cited By ~ 9

Author(s):

G. Findler ◽

J. Muchow ◽

M. Koch ◽

H. Munzel

Keyword(s):

Surface Roughness ◽

Silicon Surface ◽

Temporal Evolution ◽

Anisotropic Etching

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Creation of an insect-based microrobot with an external skeleton and elastic joints

[1992] Proceedings IEEE Micro Electro Mechanical Systems ◽

10.1109/memsys.1992.187716 ◽

1992 ◽

Cited By ~ 36

Author(s):

K. Suzuki ◽

I. Shimoyama ◽

H. Miura ◽

Y. Ezura

Keyword(s):

Elastic Joints

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Micron-sized, high aspect ratio bulk silicon micromechanical devices

[1992] Proceedings IEEE Micro Electro Mechanical Systems ◽

10.1109/memsys.1992.187719 ◽

1992 ◽

Cited By ~ 7

Author(s):

Y. Gianchandani ◽

K. Najafi

Keyword(s):

Aspect Ratio ◽

High Aspect Ratio ◽

Bulk Silicon ◽

Micromechanical Devices

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Development of an electrostatic actuator exceeding 10 N propulsive force

[1992] Proceedings IEEE Micro Electro Mechanical Systems ◽

10.1109/memsys.1992.187702 ◽

1992 ◽

Cited By ~ 21

Author(s):

T. Niino ◽

S. Egawa ◽

N. Nishiguchi ◽

T. Higuchi

Keyword(s):

Propulsive Force ◽

Electrostatic Actuator

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Precision machine design: macromachine design philosophy and its applicability to the design of micromachines

[1992] Proceedings IEEE Micro Electro Mechanical Systems ◽

10.1109/memsys.1992.187687 ◽

1992 ◽

Cited By ~ 11

Author(s):

A.H. Slocum

Keyword(s):

Machine Design ◽

Design Philosophy ◽

Precision Machine

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Manipulation of biological objects in micromachined structures

[1992] Proceedings IEEE Micro Electro Mechanical Systems ◽

10.1109/memsys.1992.187717 ◽

1992 ◽

Cited By ~ 28

Author(s):

M. Washizu

Keyword(s):

Biological Objects

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Surface-normal electrostatic/pneumatic actuator

[1992] Proceedings IEEE Micro Electro Mechanical Systems ◽

10.1109/memsys.1992.187703 ◽

1992 ◽

Cited By ~ 14

Author(s):

K.J. Gabriel ◽

O. Tabata ◽

K. Shimaoka ◽

S. Sugiyama ◽

H. Fujita

Keyword(s):

Pneumatic Actuator ◽

Surface Normal

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Anodic bonding for integrated capacitive sensors

[1992] Proceedings IEEE Micro Electro Mechanical Systems ◽

10.1109/memsys.1992.187688 ◽

1992 ◽

Cited By ~ 26

Author(s):

M. Esashi ◽

N. Ura ◽

Y. Matsumoto

Keyword(s):

Anodic Bonding ◽

Capacitive Sensors

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Helical microstructures grown by laser assisted chemical vapor deposition

[1992] Proceedings IEEE Micro Electro Mechanical Systems ◽

10.1109/memsys.1992.187711 ◽

1992 ◽

Cited By ~ 10

Author(s):

M. Boman ◽

H. Westberg ◽

S. Johansson ◽

J.-A. Schweitz

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor

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Selective mode excitation and detection of micromachined resonators

[1992] Proceedings IEEE Micro Electro Mechanical Systems ◽

10.1109/memsys.1992.187721 ◽

1992 ◽

Cited By ~ 2

Author(s):

A. Prak ◽

M. Elwenspoek ◽

J.H.J. Fluitman

Keyword(s):

Mode Excitation

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[1992] Proceedings IEEE Micro Electro Mechanical SystemsLatest Publications

TOTAL DOCUMENTS

H-INDEX

Published By IEEE

Temporal evolution of silicon surface roughness during anisotropic etching processes

Creation of an insect-based microrobot with an external skeleton and elastic joints

Micron-sized, high aspect ratio bulk silicon micromechanical devices

Development of an electrostatic actuator exceeding 10 N propulsive force

Precision machine design: macromachine design philosophy and its applicability to the design of micromachines

Manipulation of biological objects in micromachined structures

Surface-normal electrostatic/pneumatic actuator

Anodic bonding for integrated capacitive sensors

Helical microstructures grown by laser assisted chemical vapor deposition

Selective mode excitation and detection of micromachined resonators

[1992] Proceedings IEEE Micro Electro Mechanical Systems
Latest Publications