scholarly journals Fluid simulation of the plasma uniformity in new multi-directional source capacitively coupled plasma

AIP Advances ◽  
2021 ◽  
Vol 11 (7) ◽  
pp. 075121
Author(s):  
Wenchong Ouyang ◽  
Chengbiao Ding ◽  
Qi Liu ◽  
Shuzhan Gao ◽  
Weifeng Deng ◽  
...  
Keyword(s):  
Fluid Simulation ◽  
Capacitively Coupled ◽  
Capacitively Coupled Plasma ◽  
Directional Source

Two-Dimensional Fluid Simulation of Large-Scale, Capacitively-Coupled Plasma Discharge for Display Device Processes

2017 ◽  
Vol 17 (11) ◽  
pp. 8411-8417 ◽  
Author(s):  
YoungDo Jeong ◽  
Young Jun Lee ◽  
Deuk-Chul Kwon ◽  
Sang-Jin Lee ◽  
Jae-Hong Jeon ◽  
...  
Keyword(s):  
Large Scale ◽  
Plasma Discharge ◽  
Fluid Simulation ◽  
Display Device ◽  
Two Dimensional ◽  
Capacitively Coupled ◽  
Capacitively Coupled Plasma

2D fluid simulation of capacitively coupled plasma with cylindrical electrode for roll-to-roll processing

2015 ◽  
Vol 15 (11) ◽  
pp. 1287-1295
Author(s):  
Sung-Suk Wi ◽  
Moon-Ki Han ◽  
Dong-Hyun Kim ◽  
HaeJune Lee ◽  
Ho-Jun Lee ◽  
...  
Keyword(s):  
Fluid Simulation ◽  
Cylindrical Electrode ◽  
Capacitively Coupled ◽  
Roll To Roll ◽  
Capacitively Coupled Plasma

Two-dimensional fluid simulation of a radio frequency capacitively coupled plasma in SiH4/N2/O2

2018 ◽  
Vol 25 (9) ◽  
pp. 093501
Author(s):  
Wen-Zhu Jia ◽  
Rui-Qiang Liu ◽  
Xi-Feng Wang ◽  
Xiang-Mei Liu ◽  
Yuan-Hong Song ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Fluid Simulation ◽  
Two Dimensional ◽  
Capacitively Coupled ◽  
Capacitively Coupled Plasma

2-D Fluid Simulation of Dual-Frequency Capacitively Coupled Plasma

2009 ◽  
Vol 21 (6) ◽  
pp. 814-819 ◽  
Author(s):  
Yi-jia Lu ◽  
Da-qiang Yan ◽  
Yao-song Chen
Keyword(s):  
Fluid Simulation ◽  
Dual Frequency ◽  
Capacitively Coupled ◽  
Capacitively Coupled Plasma

Fluid simulation and experimental validation of plasma radial uniformity in 60 MHz capacitively coupled nitrogen discharges

2015 ◽  
Vol 117 (8) ◽  
pp. 083301 ◽  
Author(s):  
Ying-Shuang Liang ◽  
Yong-Xin Liu ◽  
Yu-Ru Zhang ◽  
You-Nian Wang
Keyword(s):  
Experimental Validation ◽  
Fluid Simulation ◽  
Capacitively Coupled

Functional separation of biasing and sustaining voltages in two-frequency capacitively coupled plasma

2000 ◽  
Vol 77 (4) ◽  
pp. 489-491 ◽  
Author(s):  
T. Kitajima ◽  
Y. Takeo ◽  
Z. Lj. Petrović ◽  
T. Makabe
Keyword(s):  
Capacitively Coupled ◽  
Capacitively Coupled Plasma
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