Two-dimensional fluid simulation of a radio frequency capacitively coupled plasma in SiH4/N2/O2

2018 ◽  
Vol 25 (9) ◽  
pp. 093501
Author(s):  
Wen-Zhu Jia ◽  
Rui-Qiang Liu ◽  
Xi-Feng Wang ◽  
Xiang-Mei Liu ◽  
Yuan-Hong Song ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Fluid Simulation ◽  
Two Dimensional ◽  
Capacitively Coupled ◽  
Capacitively Coupled Plasma

Two-Dimensional Fluid Simulation of Large-Scale, Capacitively-Coupled Plasma Discharge for Display Device Processes

2017 ◽  
Vol 17 (11) ◽  
pp. 8411-8417 ◽  
Author(s):  
YoungDo Jeong ◽  
Young Jun Lee ◽  
Deuk-Chul Kwon ◽  
Sang-Jin Lee ◽  
Jae-Hong Jeon ◽  
...  
Keyword(s):  
Large Scale ◽  
Plasma Discharge ◽  
Fluid Simulation ◽  
Display Device ◽  
Two Dimensional ◽  
Capacitively Coupled ◽  
Capacitively Coupled Plasma

Rotation of Particles Trapped in the Sheath of a Radio-Frequency Capacitively Coupled Plasma

2004 ◽  
Vol 32 (2) ◽  
pp. 601-606 ◽  
Author(s):  
G.V. Paeva ◽  
R.P. Dahiya ◽  
G.M.W. Kroesen ◽  
W.W. Stoffels
Keyword(s):  
Radio Frequency ◽  
Capacitively Coupled ◽  
Capacitively Coupled Plasma
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