Fluid simulation and experimental validation of plasma radial uniformity in 60 MHz capacitively coupled nitrogen discharges

2015 ◽  
Vol 117 (8) ◽  
pp. 083301 ◽  
Author(s):  
Ying-Shuang Liang ◽  
Yong-Xin Liu ◽  
Yu-Ru Zhang ◽  
You-Nian Wang
Keyword(s):  
Experimental Validation ◽  
Fluid Simulation ◽  
Capacitively Coupled

Two-Dimensional Fluid Simulation of Large-Scale, Capacitively-Coupled Plasma Discharge for Display Device Processes

2017 ◽  
Vol 17 (11) ◽  
pp. 8411-8417 ◽  
Author(s):  
YoungDo Jeong ◽  
Young Jun Lee ◽  
Deuk-Chul Kwon ◽  
Sang-Jin Lee ◽  
Jae-Hong Jeon ◽  
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Keyword(s):  
Large Scale ◽  
Plasma Discharge ◽  
Fluid Simulation ◽  
Display Device ◽  
Two Dimensional ◽  
Capacitively Coupled ◽  
Capacitively Coupled Plasma

Fluid simulation of species concentrations in capacitively coupled N2/Ar plasmas: Effect of gas proportion

2017 ◽  
Vol 121 (20) ◽  
pp. 203302 ◽  
Author(s):  
Ying-Shuang Liang ◽  
Gang-Hu Liu ◽  
Chan Xue ◽  
Yong-Xin Liu ◽  
You-Nian Wang
Keyword(s):  
Fluid Simulation ◽  
Capacitively Coupled

Two-Dimensional Fluid Simulation of Capacitively Coupled RF Electronegative Plasmas

1997 ◽  
Vol 36 (Part 1, No. 5A) ◽  
pp. 2874-2882 ◽  
Author(s):  
Tae Hun Chung ◽  
Lin Meng ◽  
Hyun Jin Yoon ◽  
Jae Koo Lee
Keyword(s):  
Fluid Simulation ◽  
Two Dimensional ◽  
Capacitively Coupled ◽  
Electronegative Plasmas

scholarly journals A nonlinear global model of single frequency capacitively coupled plasma and its experimental validation

AIP Advances ◽  
2018 ◽  
Vol 8 (4) ◽  
pp. 045113 ◽  
Author(s):  
P. Saikia ◽  
H. Bhuyan ◽  
M. Escalona ◽  
M. Favre ◽  
R. S. Rawat ◽  
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Keyword(s):  
Experimental Validation ◽  
Global Model ◽  
Single Frequency ◽  
Capacitively Coupled ◽  
Capacitively Coupled Plasma

2D fluid simulation of capacitively coupled plasma with cylindrical electrode for roll-to-roll processing

2015 ◽  
Vol 15 (11) ◽  
pp. 1287-1295
Author(s):  
Sung-Suk Wi ◽  
Moon-Ki Han ◽  
Dong-Hyun Kim ◽  
HaeJune Lee ◽  
Ho-Jun Lee ◽  
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Keyword(s):  
Fluid Simulation ◽  
Cylindrical Electrode ◽  
Capacitively Coupled ◽  
Roll To Roll ◽  
Capacitively Coupled Plasma

An analytical model of multi-component radio frequency capacitively coupled plasma and experimental validation

2017 ◽  
Vol 24 (1) ◽  
pp. 013503 ◽  
Author(s):  
Partha Saikia ◽  
Heman Bhuyan ◽  
Mario Favre ◽  
Edmundo Wyndham ◽  
Felipe Veloso
Keyword(s):  
Radio Frequency ◽  
Analytical Model ◽  
Experimental Validation ◽  
Capacitively Coupled ◽  
Capacitively Coupled Plasma
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