Effect of electron kinetics on plasma density in inductively coupled plasmas using a passive resonant antenna

2020 ◽  
Vol 27 (6) ◽  
pp. 063511
Author(s):  
Ju-Ho Kim ◽  
Chin-Wook Chung
Keyword(s):  
Plasma Density ◽  
Inductively Coupled Plasmas ◽  
Electron Kinetics ◽  
Inductively Coupled ◽  
Coupled Plasmas

Effects of antenna coil turns on plasma density and antenna voltage in solenoidal inductively coupled plasmas

2016 ◽  
Vol 23 (11) ◽  
pp. 113504 ◽  
Author(s):  
Jun-Hyeon Moon ◽  
Kyung-Hyun Kim ◽  
Ming-Chieh Lin ◽  
Chin-Wook Chung
Keyword(s):  
Plasma Density ◽  
Inductively Coupled Plasmas ◽  
Inductively Coupled ◽  
Coupled Plasmas

Transition of electron kinetics in weakly magnetized inductively coupled plasmas

2013 ◽  
Vol 20 (10) ◽  
pp. 101612 ◽  
Author(s):  
Jin-Yong Kim ◽  
Hyo-Chang Lee ◽  
Young-Do Kim ◽  
Young-Cheol Kim ◽  
Chin-Wook Chung
Keyword(s):  
Inductively Coupled Plasmas ◽  
Electron Kinetics ◽  
Inductively Coupled ◽  
Coupled Plasmas

Electron kinetics and non-Joule heating in near-collisionless inductively coupled plasmas

1997 ◽  
Vol 55 (3) ◽  
pp. 3408-3422 ◽  
Author(s):  
V. I. Kolobov ◽  
D. P. Lymberopoulos ◽  
D. J. Economou
Keyword(s):  
Joule Heating ◽  
Inductively Coupled Plasmas ◽  
Electron Kinetics ◽  
Inductively Coupled ◽  
Coupled Plasmas
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