A generalized electron energy probability function for inductively coupled plasmas under conditions of nonlocal electron kinetics

2018 ◽  
Vol 123 (2) ◽  
pp. 023301 ◽  
Author(s):  
S. Mouchtouris ◽  
G. Kokkoris
Keyword(s):  
Electron Energy ◽  
Probability Function ◽  
Inductively Coupled Plasmas ◽  
Electron Kinetics ◽  
Inductively Coupled ◽  
Coupled Plasmas

Transition of electron kinetics in weakly magnetized inductively coupled plasmas

2013 ◽  
Vol 20 (10) ◽  
pp. 101612 ◽  
Author(s):  
Jin-Yong Kim ◽  
Hyo-Chang Lee ◽  
Young-Do Kim ◽  
Young-Cheol Kim ◽  
Chin-Wook Chung
Keyword(s):  
Inductively Coupled Plasmas ◽  
Electron Kinetics ◽  
Inductively Coupled ◽  
Coupled Plasmas
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