Effect of antenna size on electron kinetics in inductively coupled plasmas

2013 ◽  
Vol 20 (10) ◽  
pp. 101607 ◽  
Author(s):  
Hyo-Chang Lee ◽  
Chin-Wook Chung
Keyword(s):  
Inductively Coupled Plasmas ◽  
Antenna Size ◽  
Electron Kinetics ◽  
Inductively Coupled ◽  
Coupled Plasmas

Transition of electron kinetics in weakly magnetized inductively coupled plasmas

2013 ◽  
Vol 20 (10) ◽  
pp. 101612 ◽  
Author(s):  
Jin-Yong Kim ◽  
Hyo-Chang Lee ◽  
Young-Do Kim ◽  
Young-Cheol Kim ◽  
Chin-Wook Chung
Keyword(s):  
Inductively Coupled Plasmas ◽  
Electron Kinetics ◽  
Inductively Coupled ◽  
Coupled Plasmas

Electron kinetics and non-Joule heating in near-collisionless inductively coupled plasmas

1997 ◽  
Vol 55 (3) ◽  
pp. 3408-3422 ◽  
Author(s):  
V. I. Kolobov ◽  
D. P. Lymberopoulos ◽  
D. J. Economou
Keyword(s):  
Joule Heating ◽  
Inductively Coupled Plasmas ◽  
Electron Kinetics ◽  
Inductively Coupled ◽  
Coupled Plasmas

scholarly journals Erratum: Power Matching to Pulsed Inductively Coupled Plasmas [J. Appl. Phys. 127, 133302 (2020)]

2020 ◽  
Vol 128 (8) ◽  
pp. 089901
Author(s):  
Chenhui Qu ◽  
Steven J. Lanham ◽  
Steven C. Shannon ◽  
Sang Ki Nam ◽  
Mark J. Kushner
Keyword(s):  
Inductively Coupled Plasmas ◽  
Inductively Coupled ◽  
Power Matching ◽  
Coupled Plasmas
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