Experimental observation of the transition from nonlocal to local electron kinetics in inductively coupled plasmas

2010 ◽  
Vol 96 (4) ◽  
pp. 041503 ◽  
Author(s):  
Hyo-Chang Lee ◽  
Min-Hyong Lee ◽  
Chin-Wook Chung
Keyword(s):  
Experimental Observation ◽  
Inductively Coupled Plasmas ◽  
Local Electron ◽  
Electron Kinetics ◽  
Inductively Coupled ◽  
Coupled Plasmas

Transition of electron kinetics in weakly magnetized inductively coupled plasmas

2013 ◽  
Vol 20 (10) ◽  
pp. 101612 ◽  
Author(s):  
Jin-Yong Kim ◽  
Hyo-Chang Lee ◽  
Young-Do Kim ◽  
Young-Cheol Kim ◽  
Chin-Wook Chung
Keyword(s):  
Inductively Coupled Plasmas ◽  
Electron Kinetics ◽  
Inductively Coupled ◽  
Coupled Plasmas

Electron kinetics and non-Joule heating in near-collisionless inductively coupled plasmas

1997 ◽  
Vol 55 (3) ◽  
pp. 3408-3422 ◽  
Author(s):  
V. I. Kolobov ◽  
D. P. Lymberopoulos ◽  
D. J. Economou
Keyword(s):  
Joule Heating ◽  
Inductively Coupled Plasmas ◽  
Electron Kinetics ◽  
Inductively Coupled ◽  
Coupled Plasmas
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