Epitaxial growth of silicon by photochemical vapor deposition at a very low temperature of 200 °C

1986 ◽  
Vol 49 (2) ◽  
pp. 79-81 ◽  
Author(s):  
Shoji Nishida ◽  
Tsunenori Shiimoto ◽  
Akira Yamada ◽  
Shiro Karasawa ◽  
Makoto Konagai ◽  
...  
Keyword(s):  
Low Temperature ◽  
Epitaxial Growth ◽  
Vapor Deposition ◽  
Photochemical Vapor Deposition ◽  
Very Low Temperature

Heavily B-Doped Epitaxial Si Films Grown by Photochemical Vapor Deposition at Very Low Temperature ( <200° C)

1995 ◽  
Vol 34 (Part 2, No. 11A) ◽  
pp. L1425-L1428 ◽  
Author(s):  
Takayuki Oshima ◽  
Katsuya Abe ◽  
Akira Yamada ◽  
Makoto Konagai
Keyword(s):  
Low Temperature ◽  
Vapor Deposition ◽  
Si Films ◽  
Photochemical Vapor Deposition ◽  
Very Low Temperature

Low-Temperature Silicon Epitaxial Growth by Photochemical Vapor Deposition Using Vacuum Ultraviolet Light

1987 ◽  
Vol 26 (Part 2, No. 7) ◽  
pp. L1189-L1192 ◽  
Author(s):  
Narishi Gonohe ◽  
Saburo Shimizu ◽  
Kouichi Tamagawa ◽  
Toshio Hayashi ◽  
Hiroyuki Yamakawa
Keyword(s):  
Low Temperature ◽  
Epitaxial Growth ◽  
Ultraviolet Light ◽  
Vapor Deposition ◽  
Vacuum Ultraviolet ◽  
Photochemical Vapor Deposition

Selective Si epitaxial growth by plasma‐enhanced chemical vapor deposition at very low temperature

1992 ◽  
Vol 60 (4) ◽  
pp. 442-444 ◽  
Author(s):  
K. Baert ◽  
P. Deschepper ◽  
J. Poortmans ◽  
J. Nijs ◽  
R. Mertens
Keyword(s):  
Chemical Vapor Deposition ◽  
Low Temperature ◽  
Epitaxial Growth ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Very Low Temperature

Epitaxial growth of Ge films on GaAs (285–415 °C) by laser photochemical vapor deposition

1988 ◽  
Vol 52 (20) ◽  
pp. 1710-1712 ◽  
Author(s):  
V. Tavitian ◽  
C. J. Kiely ◽  
D. B. Geohegan ◽  
J. G. Eden
Keyword(s):  
Epitaxial Growth ◽  
Vapor Deposition ◽  
Photochemical Vapor Deposition

Low-Temperature Epitaxial Growth of Silicon and Silicon-Germanium Alloy by Ultrahigh-Vacuum Chemical Vapor Deposition

1994 ◽  
Vol 33 (Part 1, No.1A) ◽  
pp. 240-246 ◽  
Author(s):  
Tz-Guei Jung ◽  
Chun-Yen Chang ◽  
Ting-Chang Chang ◽  
Horng-Chih Lin ◽  
Tom Wang ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Low Temperature ◽  
Epitaxial Growth ◽  
Vapor Deposition ◽  
Silicon Germanium ◽  
Ultrahigh Vacuum ◽  
Chemical Vapor ◽  
Germanium Alloy
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